Large eddy simulation of industrial Czochralski Si crystal growth under transverse magnetic field | |
Chen, X ; Zhan, JM ; Li, YS ; Cen, XR | |
刊名 | JOURNAL OF CRYSTAL GROWTH |
2014 | |
卷号 | 389页码:60-67 |
关键词 | Computer simulation Heat transfer Semiconducting silicon Magnetic field assisted Czochralski method |
ISSN号 | 0022-0248 |
通讯作者 | cejmzhan@gmail.com |
中文摘要 | In the present study, a simulation of large diameter industrial Czochralski Si crystal growth is carried out using a combination of 2D axisymmetric global and 3D local models. The 2D global steady simulation is performed to obtain the thermal boundary conditions on the external wall of the crucible holder for 3D transient simulation under TMF. In the 3D model, the large eddy simulation (LES) turbulence model is adopted to obtain more accurate melt convection. The computed temperature distribution on the crucible wall agrees quite well with that from DNS simulation as well as experimental results in the absence of a magnetic field or with a vertical magnetic field. In order to clarify the effect of a transverse magnetic field (TMF), three different magnetic field intensities are used for simulation. The melt flow structures and temperature fluctuations under TMF are presented. The vortices at the corners of the crucible wall in the presence of weak or moderate magnetic field would not exist if axisymmetric thermal boundary conditions are used in the 3D model. The clamping effect of TMF is also studied. (C)2013 Elsevier B.V. All rights reserved |
学科主题 | Crystallography ; Materials Science ; Physics |
收录类别 | SCI |
资助信息 | Fundamental Research Funds for the Central Universities |
原文出处 | ELSEVIER SCIENCE BV |
WOS记录号 | WOS:000335768600010 |
公开日期 | 2014-12-11 |
内容类型 | 期刊论文 |
源URL | [http://ir.scsio.ac.cn/handle/344004/10566] |
专题 | 南海海洋研究所_热带海洋环境国家重点实验室(LTO) |
推荐引用方式 GB/T 7714 | Chen, X,Zhan, JM,Li, YS,et al. Large eddy simulation of industrial Czochralski Si crystal growth under transverse magnetic field[J]. JOURNAL OF CRYSTAL GROWTH,2014,389:60-67. |
APA | Chen, X,Zhan, JM,Li, YS,&Cen, XR.(2014).Large eddy simulation of industrial Czochralski Si crystal growth under transverse magnetic field.JOURNAL OF CRYSTAL GROWTH,389,60-67. |
MLA | Chen, X,et al."Large eddy simulation of industrial Czochralski Si crystal growth under transverse magnetic field".JOURNAL OF CRYSTAL GROWTH 389(2014):60-67. |
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