The invention relates to the field of nanometer operation, in particular to a nanometer object motion model based on probability estimation in nanometer operation, namely probability nanometer operation spaces (S, S, S) based on Monte Carlo. The probability distribution state of the initial positions of a nanometer object can be expressed by sufficient sample sets S=(x, x, x and the like to x), and sample sets of initial positions of a probe are S=(x, x, x and the like to x). In any combination (x, x), x and x are respectively a coordinate sample of the initial position of the nanometer object and a coordinate sample of the initial position of the probe, the motion route of the probe is known, then an operation result x can be obtained. Operation strategies S are utilized to conduct iteration updating on (S, S, S), probability distribution S of location after the nanometer object is operated is acquired, and S=(x), wherein i is larger than or equal to 1 and smaller than or equal to n, and j is larger than or equal to 1 and smaller than or equal to m. The nanometer object motion model can be used for evaluating the operation effect of the probe and can guide route planning of the probe, namely the redundancy operation strategies are designed to meet the expected probability distribution result, and a new solution is provided for improving reliability and accuracy of nanometer operation.
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