Design and laser fabrication of controllable non-Gaussian roughness surfaces at microscale

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	Design and laser fabrication of controllable non-Gaussian roughness surfaces at microscale
	Luo, TT ; Liu, XN ; Chen, YH ; Huang, WH ; Liu, Z
刊名	APPLIED SURFACE SCIENCE
	2013
卷号	276 页码:95
关键词	Non-Gaussian roughness surface Laser direct writing Scanning probe microscopy
ISSN号	0169-4332
通讯作者	Chen, YH (reprint author), Univ Sci & Technol China, Dept Precis Machinery & Precis Instrumentat, Hefei 230026, Peoples R China.
中文摘要	Surface structures at micro-/nano-scale have been studied in many fields for their wide range of applications. To understand the interdependences between surface structures and functional performances accurately, fabrication methods of complex structures with controllable surface parameters are crucial to be investigated. Toward this purpose, 3D non-Gaussian surfaces were designed and fabricated here. Two typical design methods were compared, which are based on Johnson translator and Pearson translator respectively. Several suggestions were provided to improve the design accuracy and efficiency. Primary roughness surfaces have been fabricated by laser direct writing. Different scanning paths and designed structures were compared to optimize the fabrication accuracy. The statistical and spectral characteristics of the fabricated roughness surfaces were demonstrated to be in accord with the designed values. (C) 2013 Elsevier B. V. All rights reserved.
资助信息	973 Project [2011CB932801]; National Natural Science Foundation of China [91023021, 51275503]
语种	英语
公开日期	2014-01-16
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/56873]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Luo, TT,Liu, XN,Chen, YH,et al. Design and laser fabrication of controllable non-Gaussian roughness surfaces at microscale[J]. APPLIED SURFACE SCIENCE,2013,276:95.
APA	Luo, TT,Liu, XN,Chen, YH,Huang, WH,&Liu, Z.(2013).Design and laser fabrication of controllable non-Gaussian roughness surfaces at microscale.APPLIED SURFACE SCIENCE,276,95.
MLA	Luo, TT,et al."Design and laser fabrication of controllable non-Gaussian roughness surfaces at microscale".APPLIED SURFACE SCIENCE 276(2013):95.