Synthesis and characterization of B-C-N compounds on molybdenum

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	Synthesis and characterization of B-C-N compounds on molybdenum
	Yu, J ; Wang, EG ; Xu, GC
刊名	JOURNAL OF MATERIALS RESEARCH
	1999
卷号	14 期号:3 页码:1137
关键词	CHEMICAL-VAPOR-DEPOSITION CUBIC BORON-NITRIDE BC2N THIN-FILMS DIAMOND TEMPERATURE SYSTEM
ISSN号	0884-2914
通讯作者	Wang, EG (reprint author), Chinese Acad Sci, Inst Phys, State Key Lab Surface Phys, POB 603, Beijing 100080, Peoples R China.
中文摘要	B-C-N compounds were prepared on molybdenum by means of bias-assisted hot filament chemical vapor deposition (HFCVD), Effect of the substrate temperature (T-s) on the growth of B-C-N films has been investigated systematically by x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM) based on the detailed analysis and calculation of the XPS, The substrate temperature plays a key role in the formation of the bonding states, the composition, and the surface morphology. Boron carbonitride is the main phase at all depositing temperatures, and the obtained compounds are as follows: B0.83C0.17 +. B0.39C0.35N0.26 at 873 K, B0.30C0.34N0.36 at 973 K, B0.64C0.36 + B0.51C0.23N0.26 at 1073 K, B0.51C0.31N0.18 at 1173 K, and B0.37C0.54N0.09 at 1273 K.
收录类别	SCI
语种	英语
公开日期	2013-09-24
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/54298]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Yu, J,Wang, EG,Xu, GC. Synthesis and characterization of B-C-N compounds on molybdenum[J]. JOURNAL OF MATERIALS RESEARCH,1999,14(3):1137.
APA	Yu, J,Wang, EG,&Xu, GC.(1999).Synthesis and characterization of B-C-N compounds on molybdenum.JOURNAL OF MATERIALS RESEARCH,14(3),1137.
MLA	Yu, J,et al."Synthesis and characterization of B-C-N compounds on molybdenum".JOURNAL OF MATERIALS RESEARCH 14.3(1999):1137.