Thickness and oxygen pressure dependent structural characteristics of BaTiO3 thin films grown by laser molecular beam epitaxy

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	Thickness and oxygen pressure dependent structural characteristics of BaTiO3 thin films grown by laser molecular beam epitaxy
	Zhao, T ; Chen, F ; Lu, HB ; Yang, GZ ; Chen, ZH
刊名	JOURNAL OF APPLIED PHYSICS
	2000
卷号	87 期号:10 页码:7442
关键词	MISFIT RELAXATION MECHANISMS DOMAIN CONFIGURATIONS DIELECTRIC-PROPERTIES REACTIVE EVAPORATION CRYSTAL-STRUCTURE DEPOSITION SRTIO3 PEROVSKITES RADICALS DEFECTS
ISSN号	0021-8979
通讯作者	Zhao, T (reprint author), Chinese Acad Sci, Inst Phys, Ctr Condensed Matter Phys, Lab Opt Phys, POB 603, Beijing 100080, Peoples R China.
中文摘要	A series of BaTiO3 thin films with various thicknesses from 10 to 400 nm were epitaxially grown under various oxygen pressures from 2 x 10(-4) to 12 Pa on SrTiO3 (001) substrates using laser molecular beam epitaxy. Being confirmed by reflection high energy electron diffraction, atomic force microscopy, x-ray diffraction, and high resolution transmission electron microscopy the epitaxial single crystal BaTiO3 thin films are highly c-axis or a-axis oriented with a root-mean-square surface roughness of 0.14 nm. The observed thickness and oxygen pressure dependent structural characteristics of the BaTiO3 thin films are discussed by taking into account both the misfits in thermal expansion and lattice constants between BaTiO3 films and SrTiO3 substrates, and the effect of the energy of the sputtered particles, which is consistent with the established strain relaxation mechanism. An abnormal expansion of lattice volume of a BaTiO3 unit cell is found and attributed to the effect of oxygen vacancies in the BaTiO3 films. (C) 2000 American Institute of Physics. [S0021-8979(00)03310-7].
收录类别	SCI
语种	英语
公开日期	2013-09-23
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/45814]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Zhao, T,Chen, F,Lu, HB,et al. Thickness and oxygen pressure dependent structural characteristics of BaTiO3 thin films grown by laser molecular beam epitaxy[J]. JOURNAL OF APPLIED PHYSICS,2000,87(10):7442.
APA	Zhao, T,Chen, F,Lu, HB,Yang, GZ,&Chen, ZH.(2000).Thickness and oxygen pressure dependent structural characteristics of BaTiO3 thin films grown by laser molecular beam epitaxy.JOURNAL OF APPLIED PHYSICS,87(10),7442.
MLA	Zhao, T,et al."Thickness and oxygen pressure dependent structural characteristics of BaTiO3 thin films grown by laser molecular beam epitaxy".JOURNAL OF APPLIED PHYSICS 87.10(2000):7442.