ION-BEAM SYNTHESIS OF YTTRIUM SILICIDES IN (111)SI

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	ION-BEAM SYNTHESIS OF YTTRIUM SILICIDES IN (111)SI
	JIN, S ; LIN, JH ; CHEN, LJ ; SHI, WD ; ZHANG, Z
刊名	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
	1995
卷号	96 期号:1-2 页码:347
关键词	ULTRAHIGH-VACUUM THIN-FILMS EPITAXIAL YTTRIUM SCHOTTKY-BARRIER 111 SI SILICON GROWTH CONTACTS SI(111)
ISSN号	0168-583X
通讯作者	JIN, S: CHINESE ACAD SCI,BEIJING LAB ELECTRON MICROSCOPY,POB 2724,BEIJING 100080,PEOPLES R CHINA.
中文摘要	Formation of yttrium silicides in 170 keV, 4 X 10(17)/cm(2) Y+-implanted (111) Si has been investigated by transmission electron microscopy, X-ray diffraction and Auger electron spectroscopy. A continuous buried YSi2 layer, about 35 nm in thickness, was found to form beneath a 30 nm thick polycrystalline layer. Preferential growth of YSi2 with [001] YSi2 parallel to [111]Si was found to be the dominant mode of YSi2 growth. A high density of twins and stacking faults was observed to distribute in the layer beneath the silicide layer. In samples annealed at 800 degrees C for 1 min, a continuous silicide layer, about 100 nm in thickness, was found to form at the surface of the samples. The YSi2 was found to agglomerate in samples annealed at 1000-1100 degrees C for 1 min. A high density of defects remained beneath the original silicide/Si interface. The silicide maintained the epitaxial relationships with respect to the substrate. No sign of vacancy ordering was detected from examination of diffraction patterns of all as-implanted and annealed samples.
收录类别	SCI
语种	英语
公开日期	2013-09-18
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/40375]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	JIN, S,LIN, JH,CHEN, LJ,et al. ION-BEAM SYNTHESIS OF YTTRIUM SILICIDES IN (111)SI[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1995,96(1-2):347.
APA	JIN, S,LIN, JH,CHEN, LJ,SHI, WD,&ZHANG, Z.(1995).ION-BEAM SYNTHESIS OF YTTRIUM SILICIDES IN (111)SI.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,96(1-2),347.
MLA	JIN, S,et al."ION-BEAM SYNTHESIS OF YTTRIUM SILICIDES IN (111)SI".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 96.1-2(1995):347.