Fabrication of ultrasmooth complementary split ring resonators by an improved template stripping method on SU-8

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	Fabrication of ultrasmooth complementary split ring resonators by an improved template stripping method on SU-8
	Liu, Z ; Xia, XX ; Yang, HF ; Li, JJ ; Li, WX ; Gu, CZ
刊名	MICROELECTRONIC ENGINEERING
	2012
卷号	98 页码:363
关键词	NANOSTRUCTURES PLASMONICS
ISSN号	0167-9317
通讯作者	Gu, CZ: Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China.
中文摘要	It has been demonstrated that metamaterials play a very important role in plasmonic devices. The behavior of surface plasmon polaritons (SPPs) is highly related with the roughness of metal/dielectric interface, for instance, a smooth metal surface can largely elongate the propagation length of SPP. In this work, an improved template stripping method is developed to fabricate ultrasmooth metamaterials of nanoscale complementary split ring resonators (CSRRs). By using an ultraviolet photoresist of SU-8 as the adhesive, nanoscale metal CSRR structures with ultrasmooth surface were peeled off from silicon template by employing a combined process of pre-baking, UV irradiation and post-baking. By optimization of the pre-baking temperature and the depth of the nanopatterns, ultrasmooth nanoscale CSRRs with a gap of 30 nm were obtained. Our results indicate that the approach of template stripping by implementation of an SU-8 adhesive layer is an effective method to produce elaborated hollow nanostructures with ultrasmooth surface and nanoscale gap, which may have potentials in sensing applications. (C) 2012 Elsevier B.V. All rights reserved.
收录类别	SCI
资助信息	National Basic Research Program of China [2009CB930502]; National Natural Science Foundation of China [50825206, 1083401, 60871045, 61001045, 91023041]; Knowledge Innovation Project of CAS [KJCX2-EW-W02]
语种	英语
公开日期	2013-09-17
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/37957]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Liu, Z,Xia, XX,Yang, HF,et al. Fabrication of ultrasmooth complementary split ring resonators by an improved template stripping method on SU-8[J]. MICROELECTRONIC ENGINEERING,2012,98:363.
APA	Liu, Z,Xia, XX,Yang, HF,Li, JJ,Li, WX,&Gu, CZ.(2012).Fabrication of ultrasmooth complementary split ring resonators by an improved template stripping method on SU-8.MICROELECTRONIC ENGINEERING,98,363.
MLA	Liu, Z,et al."Fabrication of ultrasmooth complementary split ring resonators by an improved template stripping method on SU-8".MICROELECTRONIC ENGINEERING 98(2012):363.