3-DIMENSIONAL ORDERED PATTERNS BY LIGHT INTERFERENCE

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	3-DIMENSIONAL ORDERED PATTERNS BY LIGHT INTERFERENCE
	MEI, DB ; CHENG, BY ; HU, W ; LI, ZL ; ZHAN, DH
刊名	OPTICS LETTERS
	1995
卷号	20 期号:5 页码:429
关键词	BINDING GAP
ISSN号	0146-9592
通讯作者	MEI, DB: CHINESE ACAD SCI,INST PHYS,POB 603,BEIJING 100080,PEOPLES R CHINA.
中文摘要	Formation of yttrium silicides in 170 keV, 4 X 10(17)/cm(2) Y+-implanted (111) Si has been investigated by transmission electron microscopy, X-ray diffraction and Auger electron spectroscopy. A continuous buried YSi2 layer, about 35 nm in thickness, was found to form beneath a 30 nm thick polycrystalline layer. Preferential growth of YSi2 with [001] YSi2 parallel to [111]Si was found to be the dominant mode of YSi2 growth. A high density of twins and stacking faults was observed to distribute in the layer beneath the silicide layer. In samples annealed at 800 degrees C for 1 min, a continuous silicide layer, about 100 nm in thickness, was found to form at the surface of the samples. The YSi2 was found to agglomerate in samples annealed at 1000-1100 degrees C for 1 min. A high density of defects remained beneath the original silicide/Si interface. The silicide maintained the epitaxial relationships with respect to the substrate. No sign of vacancy ordering was detected from examination of diffraction patterns of all as-implanted and annealed samples.
收录类别	SCI
语种	英语
公开日期	2013-09-17
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/32769]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	MEI, DB,CHENG, BY,HU, W,et al. 3-DIMENSIONAL ORDERED PATTERNS BY LIGHT INTERFERENCE[J]. OPTICS LETTERS,1995,20(5):429.
APA	MEI, DB,CHENG, BY,HU, W,LI, ZL,&ZHAN, DH.(1995).3-DIMENSIONAL ORDERED PATTERNS BY LIGHT INTERFERENCE.OPTICS LETTERS,20(5),429.
MLA	MEI, DB,et al."3-DIMENSIONAL ORDERED PATTERNS BY LIGHT INTERFERENCE".OPTICS LETTERS 20.5(1995):429.