Fabrication of a Single CuO Nanowire-based Gas Sensor Working at Room Temperatur
Huang CL(黄超雷); Tian XJ(田孝军); Liu J(刘杰); Wang WX(王文学); Dong ZL(董再励); Liu LQ(刘连庆)
2013
会议名称3rd International Conference on Manipulation, Manu­facturing and Measurement on the Nanoscale, 3M-NANO 2013
会议日期August 26-30, 2013
会议地点Suzhou, China
关键词CuO nanowire assembly dielectrophoresis DEP field effect transistor FET alcohol gas sensor humidity sensor
页码108-113
通讯作者田孝军
中文摘要CuO is an important p-type metal oxide semiconductor material and it has been used in many fields for its excellent physical and chemical properties, such as field effect transistors, photovoltaic cells, field emission nanodevices, and chemical and gas sensors. In this paper, CuO nanowires are synthesized by thermal oxidation of copper foil and suitable DEP parameters are chosen to assemble a single CuO nanowire on microelectrodes to fabricate a single CuO nanowire-based device. Experiments in this paper show that the single CuO nanowire-based device can work as field effect transistor and gas sensor. The single CuO nanowire device has a significant respond to the atmosphere with alcohol at room temperature, so it has potential to work as an alcohol gas sensor at room temperature. The single CuO nanowire device also has quick and significant respond to the humidity at room temperature and a novel liner relationship between conductivity and the relative humidity from 30% to 100%.
收录类别EI ; CPCI(ISTP)
产权排序1
会议录3rd International Conference on Manipulation, Manu­facturing and Measurement on the Nanoscale, 3M-NANO 2013
会议录出版者IEEE
会议录出版地NEW YORK
语种英语
ISBN号978-1-4799-1210-0
WOS记录号WOS:000350808700023
内容类型会议论文
源URL[http://ir.sia.cn/handle/173321/13910]  
专题沈阳自动化研究所_机器人学研究室
推荐引用方式
GB/T 7714
Huang CL,Tian XJ,Liu J,et al. Fabrication of a Single CuO Nanowire-based Gas Sensor Working at Room Temperatur[C]. 见:3rd International Conference on Manipulation, Manu­facturing and Measurement on the Nanoscale, 3M-NANO 2013. Suzhou, China. August 26-30, 2013.
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