Fabrication of a Single CuO Nanowire-based Gas Sensor Working at Room Temperatur | |
Huang CL(黄超雷); Tian XJ(田孝军); Liu J(刘杰); Wang WX(王文学); Dong ZL(董再励); Liu LQ(刘连庆) | |
2013 | |
会议名称 | 3rd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 |
会议日期 | August 26-30, 2013 |
会议地点 | Suzhou, China |
关键词 | CuO nanowire assembly dielectrophoresis DEP field effect transistor FET alcohol gas sensor humidity sensor |
页码 | 108-113 |
通讯作者 | 田孝军 |
中文摘要 | CuO is an important p-type metal oxide semiconductor material and it has been used in many fields for its excellent physical and chemical properties, such as field effect transistors, photovoltaic cells, field emission nanodevices, and chemical and gas sensors. In this paper, CuO nanowires are synthesized by thermal oxidation of copper foil and suitable DEP parameters are chosen to assemble a single CuO nanowire on microelectrodes to fabricate a single CuO nanowire-based device. Experiments in this paper show that the single CuO nanowire-based device can work as field effect transistor and gas sensor. The single CuO nanowire device has a significant respond to the atmosphere with alcohol at room temperature, so it has potential to work as an alcohol gas sensor at room temperature. The single CuO nanowire device also has quick and significant respond to the humidity at room temperature and a novel liner relationship between conductivity and the relative humidity from 30% to 100%. |
收录类别 | EI ; CPCI(ISTP) |
产权排序 | 1 |
会议录 | 3rd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 |
会议录出版者 | IEEE |
会议录出版地 | NEW YORK |
语种 | 英语 |
ISBN号 | 978-1-4799-1210-0 |
WOS记录号 | WOS:000350808700023 |
内容类型 | 会议论文 |
源URL | [http://ir.sia.cn/handle/173321/13910] |
专题 | 沈阳自动化研究所_机器人学研究室 |
推荐引用方式 GB/T 7714 | Huang CL,Tian XJ,Liu J,et al. Fabrication of a Single CuO Nanowire-based Gas Sensor Working at Room Temperatur[C]. 见:3rd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013. Suzhou, China. August 26-30, 2013. |
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