Post-deposition annealing effects on microstructure, mechanical and tribological properties of AlCrN films

	Post-deposition annealing effects on microstructure, mechanical and tribological properties of AlCrN films
	Dongqing He; Zihan Feng; Wenwen Zheng; Wensheng Li; Lunlin Shang; Haimin Zhai; Bo Cheng; Xinjian Zhang
刊名	Journal of Materials Research and Technology
	2023-07-19
期号	25 页码:6843-6852
内容类型	期刊论文
源URL	[http://ir.licp.cn/handle/362003/30647]
专题	兰州化学物理研究所_固体润滑国家重点实验室
通讯作者	Dongqing He
推荐引用方式 GB/T 7714	Dongqing He,Zihan Feng,Wenwen Zheng,et al. Post-deposition annealing effects on microstructure, mechanical and tribological properties of AlCrN films[J]. Journal of Materials Research and Technology,2023(25):6843-6852.
APA	Dongqing He.,Zihan Feng.,Wenwen Zheng.,Wensheng Li.,Lunlin Shang.,...&Xinjian Zhang.(2023).Post-deposition annealing effects on microstructure, mechanical and tribological properties of AlCrN films.Journal of Materials Research and Technology(25),6843-6852.
MLA	Dongqing He,et al."Post-deposition annealing effects on microstructure, mechanical and tribological properties of AlCrN films".Journal of Materials Research and Technology .25(2023):6843-6852.