Signal fluctuation suppression in confocal measurements by laser modulation and power monitoring

doi:10.1016/j.measurement.2023.112745

CORC > 海洋研究所 > 中国科学院海洋研究所

	Signal fluctuation suppression in confocal measurements by laser modulation and power monitoring
	Wang, Shaoyi 1; Li, Shoujie 1; Ye, Wangquan 1; Song, Wenhua 1; Zhang, Xuanbo 1; Tian, Ye 1; Guo, Jinjia 1; Zhang, Xin 2; Zheng, Ronger 1; Lu, Yuan 1
刊名	MEASUREMENT
	2023-06-15
卷号	214 页码:8
关键词	Signal fluctuation suppression Confocal measurement Power monitoring Laser modulation Tomography
ISSN号	0263-2241
DOI	10.1016/j.measurement.2023.112745
通讯作者	Lu, Yuan(luyuan@ouc.edu.cn)
英文摘要	Signal fluctuation is an important issue in confocal measurements because minor intensity variation would cause a distinct deviation in the measurement result. In this work, it is proposed to use laser modulation and power monitoring to suppress the signal fluctuation in confocal measurements. The power monitoring is utilized to obtain the reference signal for correcting detection intensities, and the laser was operated at a modulated frequency to avoid unexpected vibrations from the ambient environment. The results indicated that the detection stability was well improved at least 3 times in the proposed way. Based on that, the precise measurement was successfully realized to resolve the nanometer-scaled structure of a blazed grating, and the surface topography was also achieved for a SIM card in a range of 40 & mu;m. The proposed way is practical in confocal measurements, and it is hoped to be applied in more applications.
资助项目	National Key Research and Development Program of China[2019GHZ010] ; Shandong Province Special Funding for Laoshan Laboratory ; Provincial Key Research and Development Program of Shandong, China[12174359] ; Natural Science Foundation of Shandong Province[2021QNLM0200033] ; National Natural Science Foundation of China ; [2022YFC2803800] ; [ZR2020MF123]
WOS关键词	LATERAL RESOLUTION ; AXIAL RESOLUTION ; MICROSCOPY ; SUPERRESOLUTION
WOS研究方向	Engineering ; Instruments & Instrumentation
语种	英语
出版者	ELSEVIER SCI LTD
WOS记录号	WOS:001054349800001
内容类型	期刊论文
源URL	[http://ir.qdio.ac.cn/handle/337002/182876]
专题	中国科学院海洋研究所
通讯作者	Lu, Yuan
作者单位	1.Ocean Univ China, Coll Phys & Optoelect Engn, Qingdao 266100, Peoples R China 2.Chinese Acad Sci, Inst Oceanol, Qingdao 266071, Peoples R China
推荐引用方式 GB/T 7714	Wang, Shaoyi,Li, Shoujie,Ye, Wangquan,et al. Signal fluctuation suppression in confocal measurements by laser modulation and power monitoring[J]. MEASUREMENT,2023,214:8.
APA	Wang, Shaoyi.,Li, Shoujie.,Ye, Wangquan.,Song, Wenhua.,Zhang, Xuanbo.,...&Lu, Yuan.(2023).Signal fluctuation suppression in confocal measurements by laser modulation and power monitoring.MEASUREMENT,214,8.
MLA	Wang, Shaoyi,et al."Signal fluctuation suppression in confocal measurements by laser modulation and power monitoring".MEASUREMENT 214(2023):8.