Multi-Position Measurable Flow Velocity Sensor for Microfluidic Applications
Hao, Yansheng4; Fang, Chaoying4; Yuan, Yapeng1; Okano, Kazunori4; Yasukuni, Ryohei4; Cheng, Shaokoon2; Tanaka, Yo1; Hosokawa, Yoichiroh4; Yang, Yang3; Li, Ming2
刊名IEEE SENSORS JOURNAL
2023-01-15
卷号23期号:2页码:1
关键词Femtosecond laser flow velocity microfluidic device ultrathin glass fabrication
ISSN号1558-1748
文献子类期刊论文
英文摘要

Here we developed an innovative flow sensor using ultrathin (i.e., 4 mu m) glass sheet fabricated by femtosecond laser processing. The sensor can quantify the flow velocity of liquid flows by measuring the displacement and vibration frequency of the ultrathin glass sheet induced by flows in the microchannel. The developed flow sensor is transparent, chemically inert, and can measure water flows with a velocity between 0.067 and 0.804 m/s (Reynolds numbers 3-36). The displacement of the ultrathin glass sensor varying from 0.4 to 3.1 mu m has negligible influence on the fluid conditions in themicrochannel. Moreover, the sensitivity and dynamic range of the sensor can be readily adjusted by optimizing geometric parameters, such as the aspect ratio and thickness of the ultrathin glass sheet. Besides, the sensor is capable of multiposition measurement to investigate the differences in localized flow velocity within the microchannel. Compared with existing cantilever-based flow velocity sensors, our developed sensor has a higher sensitivity [409 mV/(m/s)], a larger measurement range (0.067- 0.804 m/s), and a smaller displacement range (0.4-3.1 mu m), which is desirable for high-throughputmicrofluidics-based applications, such as cell separation and cell-based therapeutics.

WOS研究方向Engineering ; Instruments & Instrumentation ; Physics
语种英语
WOS记录号WOS:000928201800025
内容类型期刊论文
版本出版稿
源URL[http://ir.idsse.ac.cn/handle/183446/10170]  
专题深海工程技术部_深海资源开发研究室
作者单位1.RIKEN, Ctr Biosyst Dynam Res BDR, Suita, Osaka 5650871, Japan;
2.Macquarie Univ, Sch Engn, Sydney, NSW 2122, Australia;
3.Chinese Acad Sci, Inst Deep Sea Sci & Engn, Sanya 572000, Hainan, Peoples R China
4.Nara Inst Sci & Technol, Div Mat Sci, Nara 6300192, Japan;
推荐引用方式
GB/T 7714
Hao, Yansheng,Fang, Chaoying,Yuan, Yapeng,et al. Multi-Position Measurable Flow Velocity Sensor for Microfluidic Applications[J]. IEEE SENSORS JOURNAL,2023,23(2):1.
APA Hao, Yansheng.,Fang, Chaoying.,Yuan, Yapeng.,Okano, Kazunori.,Yasukuni, Ryohei.,...&Yalikun, Yaxiaer.(2023).Multi-Position Measurable Flow Velocity Sensor for Microfluidic Applications.IEEE SENSORS JOURNAL,23(2),1.
MLA Hao, Yansheng,et al."Multi-Position Measurable Flow Velocity Sensor for Microfluidic Applications".IEEE SENSORS JOURNAL 23.2(2023):1.
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