Multi-scale indentation model of stiff film-compliant substrate structures

doi:10.1016/j.apm.2023.02.035

CORC > 力学研究所 > 中国科学院力学研究所 > 非线性力学国家重点实验室

	Multi-scale indentation model of stiff film-compliant substrate structures
	Liu, Yanwei ; Ma HS(马寒松); Long, Hao ; Wei, Shiyuan ; Zhang, Siyuan ; Wei, Yueguang
刊名	APPLIED MATHEMATICAL MODELLING
	2023-06
卷号	119 页码:566-585
关键词	Multi -scale indentation model Stiff film -compliant substrate structures Strain gradient theory Surface elastic model Size effect
ISSN号	0307-904X
DOI	10.1016/j.apm.2023.02.035
英文摘要	As critical components or platforms, stiff film-compliant substrate structures are widely used in micro-electro-mechanical systems (MEMS) and other devices, in which their in-dentation behavior plays an important role. In this work, a multi-scale indentation model (MSI) for stiff film-compliant substrate structures is established based on the strain gradi-ent theory and the surface elastic model. With this model, the indentation size effect of the structure is investigated from three aspects: the load-depth relationship, the distribu-tion of bending moments in the film, and the surface morphology. The results show that the indentation size effect is mainly caused by the characteristic length and the surface residual stress of the film, and it is sensitive to the modulus ratio of the film to the sub-strate but has little relation with Poisson's ratio and the contact radius. Based on the above analysis, two dimensionless numbers are proposed to evaluate the indentation size effect of stiff film-compliant substrate structures. Besides, the predicted bending stiffness by the theoretical model is consistent with the experimental result, which verifies the effective-ness of the MSI model. Our research sheds light on the understanding of the indentation size effect of stiff film-compliant substrate structures and provides theoretical guidance for the design of related devices. (c) 2023 Elsevier Inc. All rights reserved.
分类号	一类
WOS研究方向	WOS:000971337900001
语种	英语
资助机构	Postdoctoral Science Foundation of China for Innovative Talents [BX20220 0 08] ; National Natural Science Foundation of China [11890681, 12032001, 11521202, 12202007]
其他责任者	Wei, YG
内容类型	期刊论文
源URL	[http://dspace.imech.ac.cn/handle/311007/92237]
专题	力学研究所_非线性力学国家重点实验室
作者单位	1.(Zhang Siyuan) Univ Shanghai Sci & Technol Sch Mech Engn Shanghai 200093 Peoples R China 2.(Wei Shiyuan) Peking Univ China Acad Adv Interdisciplinary Studies Beijing 100871 Peoples R China 3.(Wei Shiyuan) Peking Univ Coll Engn Dept Biomed Engn Beijing 100871 Peoples R China 4.(Ma Hansong) Chinese Acad Sci Inst Mech State Key Lab Nonlinear Mech Beijing 100190 Peoples R China 5.(Liu Yanwei, Long Hao, Wei Yueguang) Peking Univ Coll Engn Dept Mech & Engn Sci B ESAT Beijing 100871 Peoples R China
推荐引用方式 GB/T 7714	Liu, Yanwei,Ma HS,Long, Hao,et al. Multi-scale indentation model of stiff film-compliant substrate structures[J]. APPLIED MATHEMATICAL MODELLING,2023,119:566-585.
APA	Liu, Yanwei,马寒松,Long, Hao,Wei, Shiyuan,Zhang, Siyuan,&Wei, Yueguang.(2023).Multi-scale indentation model of stiff film-compliant substrate structures.APPLIED MATHEMATICAL MODELLING,119,566-585.
MLA	Liu, Yanwei,et al."Multi-scale indentation model of stiff film-compliant substrate structures".APPLIED MATHEMATICAL MODELLING 119(2023):566-585.