Polarization-modulated grating interferometer by conical diffraction

doi:10.1364/oe.438490

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Polarization-modulated grating interferometer by conical diffraction
	L. Liu; Z. W. Liu; S. Jiang; W. Wang; H. Z. Yu; Y. X. Jiang and W. H. Li
刊名	Optics Express
	2022
卷号	30 期号:2 页码:689-699
ISSN号	1094-4087
DOI	10.1364/oe.438490
英文摘要	The grating interferometer in the Littrow configuration uses quarter wave plates (QWPs) to modulate the polarization in the measurement system to determine the autocollimation optical path. Fabrication errors and mounting errors of the QWPs lead to phase changes in the grating interferometer that generate measurement errors. As an alternative, we propose a grating interferometer that produces conical diffraction. Using the grating instead of QWPs to modulate the beam's polarization bypasses this source of error. A 45 mm range experiment was performed that yielded a repeated measurement error of 40 nm. Experiments show that the system has a simple structure and good repeatability and is capable of high-precision displacement measurements. (C) 2022 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/66995]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	L. Liu,Z. W. Liu,S. Jiang,et al. Polarization-modulated grating interferometer by conical diffraction[J]. Optics Express,2022,30(2):689-699.
APA	L. Liu,Z. W. Liu,S. Jiang,W. Wang,H. Z. Yu,&Y. X. Jiang and W. H. Li.(2022).Polarization-modulated grating interferometer by conical diffraction.Optics Express,30(2),689-699.
MLA	L. Liu,et al."Polarization-modulated grating interferometer by conical diffraction".Optics Express 30.2(2022):689-699.