Design of 4.7 m High-Efficiency Hybrid Dielectric Reflection Gratings

doi:10.3390/mi13040632

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Design of 4.7 m High-Efficiency Hybrid Dielectric Reflection Gratings
	Y. Wang; X. Fu; Y. Chen; Y. Lei; L. Qin and L. Wang
刊名	Micromachines
	2022
卷号	13 期号:4
ISSN号	2072666X
DOI	10.3390/mi13040632
英文摘要	Traditional reflective diffraction gratings working at 4.7 m are fabricated by metal coatings. Due to the absorption of the metal itself, the diffraction efficiency (DE) could not reach over 95%. In this paper, we propose a 3 m period multilayer grating design using hybrid multilayer dielectrics. With a layer of 0.353 m Si and a layer of 0.905 m SiO2 forming the rectangular grating, the maximum of larger than 99.99% and the overall first-order DE reached 97.88%. The usable spectrum width is larger than 0.2 m, more than four times larger than that of the pure Si rectangular grating. This high DE multilayer grating is an ideal element for high-power laser systems with the spectrum beam combining method. 2022 by the authors. Licensee MDPI, Basel, Switzerland.
URL标识	查看原文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/66530]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Wang,X. Fu,Y. Chen,et al. Design of 4.7 m High-Efficiency Hybrid Dielectric Reflection Gratings[J]. Micromachines,2022,13(4).
APA	Y. Wang,X. Fu,Y. Chen,Y. Lei,&L. Qin and L. Wang.(2022).Design of 4.7 m High-Efficiency Hybrid Dielectric Reflection Gratings.Micromachines,13(4).
MLA	Y. Wang,et al."Design of 4.7 m High-Efficiency Hybrid Dielectric Reflection Gratings".Micromachines 13.4(2022).