Characteristics of Step Surface Shape Error in Snapshot Interference Imaging Spectrometer

doi:10.3788/AOS202242.0930001

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Characteristics of Step Surface Shape Error in Snapshot Interference Imaging Spectrometer
	J. Lu; J. Liang; W. Wang; Y. Qin and J. Tao
刊名	Guangxue Xuebao/Acta Optica Sinica
	2022
卷号	42 期号:9
ISSN号	2532239
DOI	10.3788/AOS202242.0930001
英文摘要	Through coupling the light fields of multiple imaging with a microlens array and phase modulation with multiple micro-mirrors, the snapshot interference imaging spectrometer achieves the simultaneous detection of the image and spectrum of a dynamic scene. The substrate processing accuracy and film surface stress cause the bending deformation of the step surfaces in the multiple micro-mirrors and further affect the quality of the spectrum and imaging. In this paper, the surface shape error characteristics of bending deformation of the step surfaces in the multiple micro-mirrors were analyzed to build a light field transmission model of the step surface shape error. The calculation results show that different distributions of the step surface shape error produce different intensity changes in the interference image point array in each field of view and different noise distribution characteristics in the recovered spectrum. The step surface shape error introduces a phase error into the recovered spectrum in different imaging fields and modulates the intensity distribution of coherent image points. The reconstructed spectrum error increases monotonically with the absolute value of the step sagittal height of the two multiple micro-mirrors. This relationship can be leveraged to evaluate system performance with the measured value of the step sagittal height and provide theoretical guidance for device fabrication. 2022, Chinese Lasers Press. All right reserved.
URL标识	查看原文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/66465]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	J. Lu,J. Liang,W. Wang,et al. Characteristics of Step Surface Shape Error in Snapshot Interference Imaging Spectrometer[J]. Guangxue Xuebao/Acta Optica Sinica,2022,42(9).
APA	J. Lu,J. Liang,W. Wang,&Y. Qin and J. Tao.(2022).Characteristics of Step Surface Shape Error in Snapshot Interference Imaging Spectrometer.Guangxue Xuebao/Acta Optica Sinica,42(9).
MLA	J. Lu,et al."Characteristics of Step Surface Shape Error in Snapshot Interference Imaging Spectrometer".Guangxue Xuebao/Acta Optica Sinica 42.9(2022).