Achieving ultra-low friction of a-C:H film grown on 9Cr18Mo steel for industrial application via programmable high power pulse magnetron sputtering

	Achieving ultra-low friction of a-C:H film grown on 9Cr18Mo steel for industrial application via programmable high power pulse magnetron sputtering
	Lei Sun 1,2; Qian Jia 1; Bin Zhang 1; Kaixiong Gao 1; Xin Tan 2; Zhenguo Lai 1; Junyan Zhang 1
刊名	Surface and Interface Analysis
	2021
期号	54 页码:81-91
内容类型	期刊论文
源URL	[http://ir.licp.cn/handle/362003/29977]
专题	兰州化学物理研究所_固体润滑国家重点实验室
作者单位	1.中国科学院兰州化学物理研究所，材料磨损与防护科技重点实验室 2.内蒙古科技大学机械工程学院
推荐引用方式 GB/T 7714	Lei Sun,Qian Jia,Bin Zhang,et al. Achieving ultra-low friction of a-C:H film grown on 9Cr18Mo steel for industrial application via programmable high power pulse magnetron sputtering[J]. Surface and Interface Analysis,2021(54):81-91.
APA	Lei Sun.,Qian Jia.,Bin Zhang.,Kaixiong Gao.,Xin Tan.,...&Junyan Zhang.(2021).Achieving ultra-low friction of a-C:H film grown on 9Cr18Mo steel for industrial application via programmable high power pulse magnetron sputtering.Surface and Interface Analysis(54),81-91.
MLA	Lei Sun,et al."Achieving ultra-low friction of a-C:H film grown on 9Cr18Mo steel for industrial application via programmable high power pulse magnetron sputtering".Surface and Interface Analysis .54(2021):81-91.