Influence of working pressure on structure and properties of diamond-like carbon films

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	Influence of working pressure on structure and properties of diamond-like carbon films
	Ling, Xiao 1,2; Yu, Shurong 1; Zhang, Junyan 2
刊名	Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering
	2014-06-01
卷号	43 期号:6 页码:1878-1882
关键词	Carbon films Diamonds Mechanical properties Plasma CVD Plasma enhanced chemical vapor deposition Scanning electron microscopy Structure (composition) Tribology 316 L stainless steel Diamond like carbon Microstructures and properties Plasma enhanced chemical vapor depositions (PE CVD) Properties Structure and properties Tribological properties Working pressures
ISSN号	10072276
英文摘要	The diamond-like carbon (DLC) films were prepared by plasma-enhanced chemical vapor deposition (PECVD) with CH4 as the gas at different working pressure, on substrates of 316L stainless steel. The microstructures and properties of the films were characterized with Raman spectroscopy, scanning electron microscopy, nano-indenter and tribo-test. With the increase of working pressure from 7 Pa to 15 Pa, the sp3 content and mechanical properties of the films increased and the tribological properties decreased obviously. However, with the increase of working pressure from 15 Pa to 31 Pa, the sp3 content and mechanical properties of the films decreased and the tribological properties increased obviously.
语种	中文
出版者	Chinese Society of Astronautics
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/113573]
专题	石油化工学院
作者单位	1.School of Petrochemical Technology, Lanzhou University of Technology, Lanzhou 730050, China; 2.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Science, Lanzhou 730000, China
推荐引用方式 GB/T 7714	Ling, Xiao,Yu, Shurong,Zhang, Junyan. Influence of working pressure on structure and properties of diamond-like carbon films[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,2014,43(6):1878-1882.
APA	Ling, Xiao,Yu, Shurong,&Zhang, Junyan.(2014).Influence of working pressure on structure and properties of diamond-like carbon films.Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,43(6),1878-1882.
MLA	Ling, Xiao,et al."Influence of working pressure on structure and properties of diamond-like carbon films".Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering 43.6(2014):1878-1882.