Development of Diamond-like Carbon Resistive Electrode for Micro-pattern Gas Detector

doi:10.7538/yzk.2020.youxian.0060

	Development of Diamond-like Carbon Resistive Electrode for Micro-pattern Gas Detector
	Shang, Lunlin 1,3; Zhou, Yi 2; Lyu, You 2; Zhang, Guang'an 3; Li, Wensheng 1
刊名	Yuanzineng Kexue Jishu/Atomic Energy Science and Technology
	2020-06-20
卷号	54 期号:6 页码:968-974
关键词	Carbon Gas detectors Hydrogen Bonding strength Diamond like carbon Micropattern gas detector New detectors Surface resistivity Target currents Vacuum degree
ISSN号	10006931
DOI	10.7538/yzk.2020.youxian.0060
英文摘要	A new type of diamond-like carbon (DLC) resistive electrode for micro-pattern gas detector (MPGD) was developed by magnetron sputtering. A variety of factors affecting DLC surface resistivity were studied systematically, including target current, vacuum degree and element doping. Also the bonding strength and internal stress of DLC resistive electrodes were adjusted and optimized. The results show that the surface resistivity decreases as the target current increases. The higher the vacuum degree, the smaller the surface resistivity of DLC resistive electrode and the better the stability. The doping of hydrogen and nitrogen can increase the surface resistivity and the influence of hydrogen is greater. This method lays a technical foundation for the development and performance improvement of new detector. © 2020, Editorial Board of Atomic Energy Science and Technology. All right reserved.
语种	中文
出版者	Atomic Energy Press
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/115736]
专题	材料科学与工程学院
作者单位	1.School of Materials Science and Engineering, Lanzhou University of Technology, Lanzhou; 730050, China; 2.State Key Laboratory of Particle Detection and Electronics, University of Science and Technology of China, Hefei; 230026, China 3.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou; 730000, China;
推荐引用方式 GB/T 7714	Shang, Lunlin,Zhou, Yi,Lyu, You,et al. Development of Diamond-like Carbon Resistive Electrode for Micro-pattern Gas Detector[J]. Yuanzineng Kexue Jishu/Atomic Energy Science and Technology,2020,54(6):968-974.
APA	Shang, Lunlin,Zhou, Yi,Lyu, You,Zhang, Guang'an,&Li, Wensheng.(2020).Development of Diamond-like Carbon Resistive Electrode for Micro-pattern Gas Detector.Yuanzineng Kexue Jishu/Atomic Energy Science and Technology,54(6),968-974.
MLA	Shang, Lunlin,et al."Development of Diamond-like Carbon Resistive Electrode for Micro-pattern Gas Detector".Yuanzineng Kexue Jishu/Atomic Energy Science and Technology 54.6(2020):968-974.