Microstructure and Tribological Properties of C/N Co-Doping MoS2 Composite Film

doi:10.16078/j.tribology.2017.04.016

	Microstructure and Tribological Properties of C/N Co-Doping MoS2 Composite Film
	Zhang, Xiaoqin 1,2; Yu, Fucheng 2; Chai, Liqiang 1; Xu, Jiao 1; He, Tengfei 1,2; Pang, Xianjuan 3; Wang, Peng 1
刊名	Mocaxue Xuebao/Tribology
	2017-07-01
卷号	37 期号:4 页码:537-543
关键词	Carbon films Cobalt compounds Friction Graphite Layered semiconductors Magnetron sputtering Mechanical properties Microstructure Molybdenum compounds Multilayer films Multilayers Semiconductor doping Tribology Wear resistance Ambient air conditions Carbon concentrations Friction coefficients Friction experiments Mechanical and tribological properties Radio frequency magnetron sputtering Self assembled multilayers Tribological properties
ISSN号	10040595
DOI	10.16078/j.tribology.2017.04.016
英文摘要	In this study, the C/N co-doping MoS2 composite films (MSCN) with different sputtering power applied on graphite target were deposited by radio frequency magnetron sputtering of graphite and MoS2 targets in argon and nitrogen atmosphere. The influence of C/N co-doping on microstructure, mechanical and tribological properties of deposited films was analyzed using the various analytical techniques. The results show that increasing the sputtering power applied on graphite target led to the increase of carbon concentration in the MSCN composite films, resulting in the formation of dense structure and smooth surface. When the graphite target sputtering power reached 350 W, a selfassembled multilayer structure with periodicity in the nanometer scale formed. Benefiting from the compact and selfassembled multilayer structure, the maximum hardness of MSCN film reached up to 9.76 GPa, and corresponding friction experiment indicates that comparing to pure MoS2 film the composite films exhibited lower friction coefficient and high wear resistance both in high vacuum and ambient air conditions. © 2017, Science Press. All right reserved.
语种	中文
出版者	Science Press
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/114956]
专题	材料科学与工程学院
作者单位	1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou; Gansu; 730000, China; 2.College of Materials Science and Engineering, Lanzhou University of Technology, Lanzhou; Gansu; 730050, China; 3.National United Engineering Laboratory for Advanced Bearing Tribology, Henan University of Science and Technology, Kaifeng; Henan; 475001, China
推荐引用方式 GB/T 7714	Zhang, Xiaoqin,Yu, Fucheng,Chai, Liqiang,et al. Microstructure and Tribological Properties of C/N Co-Doping MoS2 Composite Film[J]. Mocaxue Xuebao/Tribology,2017,37(4):537-543.
APA	Zhang, Xiaoqin.,Yu, Fucheng.,Chai, Liqiang.,Xu, Jiao.,He, Tengfei.,...&Wang, Peng.(2017).Microstructure and Tribological Properties of C/N Co-Doping MoS2 Composite Film.Mocaxue Xuebao/Tribology,37(4),537-543.
MLA	Zhang, Xiaoqin,et al."Microstructure and Tribological Properties of C/N Co-Doping MoS2 Composite Film".Mocaxue Xuebao/Tribology 37.4(2017):537-543.