Effects of Liquid Nitrogen Shock Chilling on the Performance of Hydrogenated Amorphous Carbon Films

doi:10.16078/j.tribology.2019094

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	Effects of Liquid Nitrogen Shock Chilling on the Performance of Hydrogenated Amorphous Carbon Films
	Wang, Zhaolong 2; Xue, Yong 3; Zhang, Bin 1,2; Gao, Kaixiong 1,2; Qiang, Li 1,2; Mu, Zhixing 2,4; Wang, Kai 2,4
刊名	Mocaxue Xuebao/Tribology
	2020
卷号	40 期号:1 页码:82-88
关键词	Amorphous carbon Friction Hydrogenation Liquefied gases Liquid nitrogen Plasma CVD Plasma enhanced chemical vapor deposition Thermodynamic stability Wear of materials a-C:H films Elastic recovery Friction coefficients Hydrogenated amorphous carbon films Plasma enhanced chemical vapor deposition systems Wear volume
ISSN号	10040595
DOI	10.16078/j.tribology.2019094
英文摘要	The hydrogenated amorphous carbon films were deposited by plasma enhanced chemical vapor deposition system. When the films were heated at the objective temperature, the liquid nitrogen was used for shock chilling. The structures, mechanical and frictional performances variation of the hydrogenated amorphous carbon films were investigated. The results suggest that hardness of films gradually increased with liquid nitrogen shock chilling at 200~300, and decreased liquid nitrogen shock chilling at 350~400. The elastic recovery and C-C sp2 bond increased in all experiment. The friction coefficients and wear volumes were all reduced after liquid nitrogen shock chilling, particularly under the temperature of 300 which showed the minimum of friction coefficient and wear volume. © 2020, Science Press. All right reserved.
语种	中文
出版者	Science Press
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/115826]
专题	兰州理工大学
作者单位	1.College of Materials Sciences and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing; 100049, China; 2.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou; Gansu; 730000, China; 3.The Third Filiale of 404 Company Limited, CNNC, Lanzhou; Gansu; 732850, China; 4.College of Petrochemical Technology, Lanzhou University of Technology, Lanzhou; Gansu; 730050, China
推荐引用方式 GB/T 7714	Wang, Zhaolong,Xue, Yong,Zhang, Bin,et al. Effects of Liquid Nitrogen Shock Chilling on the Performance of Hydrogenated Amorphous Carbon Films[J]. Mocaxue Xuebao/Tribology,2020,40(1):82-88.
APA	Wang, Zhaolong.,Xue, Yong.,Zhang, Bin.,Gao, Kaixiong.,Qiang, Li.,...&Wang, Kai.(2020).Effects of Liquid Nitrogen Shock Chilling on the Performance of Hydrogenated Amorphous Carbon Films.Mocaxue Xuebao/Tribology,40(1),82-88.
MLA	Wang, Zhaolong,et al."Effects of Liquid Nitrogen Shock Chilling on the Performance of Hydrogenated Amorphous Carbon Films".Mocaxue Xuebao/Tribology 40.1(2020):82-88.