Measurement of NOx concentration at ppb level in high-purity gases based on chemiluminescence method

doi:10.7498/aps.71.20220061

CORC > 力学研究所 > 中国科学院力学研究所 > 流固耦合系统力学重点实验室(2012-)

	Measurement of NOx concentration at ppb level in high-purity gases based on chemiluminescence method
	Meng, Zhang 1,2,3,4; Peng Zhi-Min 1; Yang Qian-Suo 2,3; Ding Yan-Jun 1; Du Yan-Junl 4
刊名	ACTA PHYSICA SINICA
	2022-07-05
卷号	71 期号:13 页码:9
关键词	chemiluminescence high-purity gas trace gas quenching
ISSN号	1000-3290
DOI	10.7498/aps.71.20220061
通讯作者	Du Yan-Junl(YanjunDu@ncepu.edu.cn)
英文摘要	High-purity gases are widely used in semiconductor device manufacturing and fuel cell industries. However, the impurities have a significant influence on the processing accuracy directly. Thus, it is particularly necessary to carry out the concentration diagnosis of key trace impurity gases. In this work, an integrated system for the simultaneous detection of trace NO/NOx is designed based on the chemiluminescence spectrum theory and the catalytic conversion mechanism of nitrogen oxides. The test experiments reveal that the measurement system has the advantages of high linearity (R-2 = 0.99967), high sensitivity, low detection limit (similar to 25 ppt), and easy operation. Subsequently, the measurement method for NOx with different high-purity gases are established considering the quenching effects of different background gases on fluorescence and phosphorescent. The detection system is then used to measure the ppb-level NOx impurities in four commonly used high-purity gases (Ar, O-2, CO2, N-2) in the laboratory. The results show that the NO impurity in CO2 gas is the highest, approximately 9 ppb,but relatively low, 0-4 ppb, in the other high-purity gases. The NO2 impurities in all four high-purity gases are very low (< 6 ppb). Finally, the NOx impurity content values in high-purity gases are evaluated and analyzed based on the gas preparation and purification approach. The aim of the work is to provide a reliable diagnostic approach and data basis of the impurity composition for the fuel cell, semiconductor and other cutting-edge technological fields.
资助项目	National Key R&D Program of China[2019YFB2006002] ; Huaneng Group Headquarters Technology Project 'Basic Energy Technology Research Project'[HNKJ20-H50]
WOS关键词	NITRIC-OXIDE ; CATALYTIC-REDUCTION ; OPTIMIZATION ; DETECTOR
WOS研究方向	Physics
语种	英语
WOS记录号	WOS:000841471000018
资助机构	National Key R&D Program of China ; Huaneng Group Headquarters Technology Project 'Basic Energy Technology Research Project'
内容类型	期刊论文
源URL	[http://dspace.imech.ac.cn/handle/311007/89901]
专题	力学研究所_流固耦合系统力学重点实验室(2012-)
通讯作者	Du Yan-Junl
作者单位	1.Tsinghua Univ, Dept Energy & Power Engn, State Key Lab Power Syst, Beijing 100084, Peoples R China 2.Chinese Acad Sci, Inst Mech, Key Lab Mech Fluid Solid Coupling Syst, Beijing 100190, Peoples R China 3.Univ Chinese Acad Sci, Sch Engn Sci, Beijing 100049, Peoples R China 4.North China Elect Power Univ, Sch Control & Comp Engn, Beijing 102206, Peoples R China
推荐引用方式 GB/T 7714	Meng, Zhang,Peng Zhi-Min,Yang Qian-Suo,et al. Measurement of NOx concentration at ppb level in high-purity gases based on chemiluminescence method[J]. ACTA PHYSICA SINICA,2022,71(13):9.
APA	Meng, Zhang,Peng Zhi-Min,Yang Qian-Suo,Ding Yan-Jun,&Du Yan-Junl.(2022).Measurement of NOx concentration at ppb level in high-purity gases based on chemiluminescence method.ACTA PHYSICA SINICA,71(13),9.
MLA	Meng, Zhang,et al."Measurement of NOx concentration at ppb level in high-purity gases based on chemiluminescence method".ACTA PHYSICA SINICA 71.13(2022):9.