Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD

doi:10.1016/j.jnoncrysol.2021.121378

CORC > 金属研究所 > 中国科学院金属研究所

	Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD
	Liu, Housheng 1,2; Tariq, Naeem ul Haq 3; Jing, Weichen 1,2; Cui, Xinyu 2; Tang, Mingqiang 2; Xiong, Tianying 2
刊名	JOURNAL OF NON-CRYSTALLINE SOLIDS
	2022-03-01
卷号	579 页码:7
关键词	SiOC coatings MOCVD Hardness and modulus HF etch resistance
ISSN号	0022-3093
DOI	10.1016/j.jnoncrysol.2021.121378
通讯作者	Tang, Mingqiang(mqtang@imr.ac.cn) ; Xiong, Tianying(tyxiong@imr.ac.cn)
英文摘要	In this study, silicon oxycarbide (SiOC) glass coatings were successfully deposited by thermal metal organic chemical vapor deposition (MOCVD). The composition, chemical bonding and mechanical properties of the prepared SiOC glass coatings were studied using X-ray photoelectron spectroscopy (XPS) and nano indentation techniques. The surface morphologies of SiOC coatings were characterized by field emission scanning electron microscopy (FESEM) before and after etching with HF acid for prolong time. The results showed that the percentage of Si-C bonds in SiOC glass coatings increases with increasing the content of HMDS in liquid precursors mixture. Raman spectroscopy results revealed the presence of amorphous carbon (with high content of sp3 bonds) in the prepared SiOC coatings. Consequently, the hardness and modulus of SiOC glass coatings increased from 8.99 GPa and 82.6 GPa to 17.93 GPa and 195.6 GPa, respectively. Further, the prepared SiOC glass coatings exhibited excellent corrosion resistance against HF acid.
资助项目	National Key Research and Development Project[2019YFB2005302]
WOS研究方向	Materials Science
语种	英语
出版者	ELSEVIER
WOS记录号	WOS:000754680200001
资助机构	National Key Research and Development Project
内容类型	期刊论文
源URL	[http://ir.imr.ac.cn/handle/321006/173336]
专题	金属研究所_中国科学院金属研究所
通讯作者	Tang, Mingqiang; Xiong, Tianying
作者单位	1.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Peoples R China 2.Chinese Acad Sci, Shi Changxu Innovat Ctr Adv Mat, Inst Met Res, Shenyang 110016, Peoples R China 3.Pakistan Inst Engn & Appl Sci, Dept Met & Mat Engn, Islamabad, Pakistan
推荐引用方式 GB/T 7714	Liu, Housheng,Tariq, Naeem ul Haq,Jing, Weichen,et al. Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS,2022,579:7.
APA	Liu, Housheng,Tariq, Naeem ul Haq,Jing, Weichen,Cui, Xinyu,Tang, Mingqiang,&Xiong, Tianying.(2022).Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD.JOURNAL OF NON-CRYSTALLINE SOLIDS,579,7.
MLA	Liu, Housheng,et al."Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD".JOURNAL OF NON-CRYSTALLINE SOLIDS 579(2022):7.