Separation detection and correction of mosaic errors in mosaic gratings based on two detection lights with the same diffraction order and different incident angles

doi:10.1016/j.optlaseng.2020.106281

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Separation detection and correction of mosaic errors in mosaic gratings based on two detection lights with the same diffraction order and different incident angles
	G. Yang; X. Qi; X. Mi; S. Zhang; H. Yu; H. Yu and X. Li
刊名	Optics and Lasers in Engineering
	2021
卷号	139
ISSN号	1438166
DOI	10.1016/j.optlaseng.2020.106281
英文摘要	Grating tiling is an important fabrication technology for large-size gratings. However, when using grating tiling technology to form large-size echelle gratings, the interferometer cannot detect the grating's zero-order diffraction wavefront because the zero-order diffraction light of the echelle grating is weak. This prevents use of the zero-order and non-zero-order diffraction light of the grating to realize separation detection and correction of mosaic errors. To solve this problem, a new method for separation detection and correction of mosaic errors in mosaic gratings based on two detection lights with the same diffraction order but different incident angles is proposed and a mosaic error detection system is designed. Then, the correction steps for mosaic errors are summarized and the error in mosaic error detection system is analyzed. Finally, the measurement uncertainty in detecting the wavefront of the mosaic grating and the mosaic accuracy of the grating wavefront are analyzed. The uncertainty is 0.008 (=632.8 nm) and the mosaic accuracy of the peak-to-valley wavefront is 0.069, which shows that high-precision measurements of the wavefront and high-precision mosaic of the wavefront were successfully achieved. The proposed method can be used for the mosaic of all blazed gratings. 2020
URL标识	查看原文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/65622]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	G. Yang,X. Qi,X. Mi,et al. Separation detection and correction of mosaic errors in mosaic gratings based on two detection lights with the same diffraction order and different incident angles[J]. Optics and Lasers in Engineering,2021,139.
APA	G. Yang,X. Qi,X. Mi,S. Zhang,H. Yu,&H. Yu and X. Li.(2021).Separation detection and correction of mosaic errors in mosaic gratings based on two detection lights with the same diffraction order and different incident angles.Optics and Lasers in Engineering,139.
MLA	G. Yang,et al."Separation detection and correction of mosaic errors in mosaic gratings based on two detection lights with the same diffraction order and different incident angles".Optics and Lasers in Engineering 139(2021).