Novel nano-scale absolute linear displacement measurement based on grating projection imaging

doi:10.1016/j.measurement.2021.109738

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Novel nano-scale absolute linear displacement measurement based on grating projection imaging
	H. Yu; Q. Wan; Z. Mu; Y. Du and L. Liang
刊名	Measurement: Journal of the International Measurement Confederation
	2021
卷号	182
ISSN号	2632241
DOI	10.1016/j.measurement.2021.109738
英文摘要	There is urgent demand for new absolute Linear Displacement Measurement (LDM) technology with high resolution and high precision, during the development of high-end numerical control technology. In previous research, we found that displacement measurement based on the image processing method performs well, however, the volume increases when using an imaging lens, and the system is susceptible to factors such as virtual focus. In this paper, the lensless LDM image optical path is established based on grating projection imaging, then the absolute grating coding method is operated based on Msequence pseudo-random coding. A linear displacement subdivision algorithm is then deployed based on the digital image recognition algorithm. An LDM device with a measuring range of 250 mm was designed to test the performance of the proposed method. The device shows a measurement resolution of 1 nm and measurement accuracy of 1.76 m in the range of 250 mm. This work lays a foundation for further research on high performance LDM technology. 2021 Elsevier Ltd
URL标识	查看原文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/65468]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	H. Yu,Q. Wan,Z. Mu,et al. Novel nano-scale absolute linear displacement measurement based on grating projection imaging[J]. Measurement: Journal of the International Measurement Confederation,2021,182.
APA	H. Yu,Q. Wan,Z. Mu,&Y. Du and L. Liang.(2021).Novel nano-scale absolute linear displacement measurement based on grating projection imaging.Measurement: Journal of the International Measurement Confederation,182.
MLA	H. Yu,et al."Novel nano-scale absolute linear displacement measurement based on grating projection imaging".Measurement: Journal of the International Measurement Confederation 182(2021).