Influence of alignment error on DMD super-resolution imaging optical system

doi:10.37188/CO.2020-0220

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Influence of alignment error on DMD super-resolution imaging optical system
	S.-Y. Xing; C. Wang; M. Xu; Y.-C. Li; H.-D. Shi; Z. Liu and Q. Fu
刊名	Chinese Optics
	2021
卷号	14 期号:5 页码:1194-1201
ISSN号	20951531
DOI	10.37188/CO.2020-0220
英文摘要	At present, most of the research on super-resolution imaging technology is focused on the super-resolution reconstruction algorithm, but the influence of the alignment error of an optical system on the super-resolution imaging results has not been reported. To solve this problem, We researche the influence of alignment error on super-resolution imaging. First, the basic imaging model of super-resolution imaging optical system based on Digital Micro-mirror Device (DMD) is established. A DMD super-resolution imaging optical system with operating band of 8~12 m is designed, and a method used to analyze the influence of the alignment error on super-resolution imaging quality is proposed. In the imaging model, alignment errors such as eccentricity, tilt, lens spacing error and defocus are introduced, and the reconstruction results are analyzed. Finally, the range of tolerance of the super-resolution imaging optical system is obtained. The results show that the total eccentricity error in the X direction is controlled within 0.07 mm, and that in the Y direction is within 0.05 mm; the total tilt error in the X and Y directions is controlled within 0.06; the overall lens spacing error is controlled within 0.02 mm; the defocusing amount of the imaging object lens is controlled within 0.04 mm; the defocusing amount of the projection objective lens is controlled within 0.05 mm, and within this range, the super-resolution imaging optical system can ensure the quality of super-resolution imaging. 2021, China Science Publishing & Media LTD. All right reserved.
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内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/65337]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	S.-Y. Xing,C. Wang,M. Xu,et al. Influence of alignment error on DMD super-resolution imaging optical system[J]. Chinese Optics,2021,14(5):1194-1201.
APA	S.-Y. Xing,C. Wang,M. Xu,Y.-C. Li,H.-D. Shi,&Z. Liu and Q. Fu.(2021).Influence of alignment error on DMD super-resolution imaging optical system.Chinese Optics,14(5),1194-1201.
MLA	S.-Y. Xing,et al."Influence of alignment error on DMD super-resolution imaging optical system".Chinese Optics 14.5(2021):1194-1201.