Fabrication of grooves on polymer-derived SiAlCN ceramics using femtosecond laser pulses

doi:10.1016/j.ceramint.2020.01.209

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Fabrication of grooves on polymer-derived SiAlCN ceramics using femtosecond laser pulses
	Y. G. Chen,Y. J. Cao,Y. G. Wang,L. G. Zhang,G. Shao and J. F. Zi
刊名	Ceramics International
	2020
卷号	46 期号:8 页码:11747-11761
ISSN号	0272-8842
DOI	10.1016/j.ceramint.2020.01.209
英文摘要	In this study, grooves were fabricated on the surface of fully dense polymer-derived SiAlCN ceramics. Industrial femtosecond laser source was used at wavelength of 1030 nm with pulse duration of 290 fs and repetition rate of 100 kHz. Moreover, comprehensive study was carried out to evaluate the influence of scan speed and energy fluence on grooves quality, including the heat-affected zone around the laser-machined grooves, microstructures of laser-irradiated surface, and cross-section morphology of grooves. A series of grooves with width in the range of 30-80 mu m and depth below 280 mu m was successfully fabricated using femtosecond laser pulse. Laser parameters were optimized to obtain grooves with satisfying surface quality. Furthermore, formation and disappearance of laser-induced periodic surface structures were systematically investigated. This study proposes fabrication of grooves on SiAlCN ceramics via laser processing, which provides precise method for fabrication of microstructure with fascinating properties.
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语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/64516]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. G. Chen,Y. J. Cao,Y. G. Wang,L. G. Zhang,G. Shao and J. F. Zi. Fabrication of grooves on polymer-derived SiAlCN ceramics using femtosecond laser pulses[J]. Ceramics International,2020,46(8):11747-11761.
APA	Y. G. Chen,Y. J. Cao,Y. G. Wang,L. G. Zhang,G. Shao and J. F. Zi.(2020).Fabrication of grooves on polymer-derived SiAlCN ceramics using femtosecond laser pulses.Ceramics International,46(8),11747-11761.
MLA	Y. G. Chen,Y. J. Cao,Y. G. Wang,L. G. Zhang,G. Shao and J. F. Zi."Fabrication of grooves on polymer-derived SiAlCN ceramics using femtosecond laser pulses".Ceramics International 46.8(2020):11747-11761.