AlGaN-based UV-C distributed Bragg reflector with a -cavity designed for an external cavity structure electron-beam-pumped VCSEL

doi:10.1016/j.jallcom.2019.153415

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	AlGaN-based UV-C distributed Bragg reflector with a -cavity designed for an external cavity structure electron-beam-pumped VCSEL
	Y. R. Chen, Z. W. Zhang, G. Q. Miao, H. Jiang, Z. M. Li and H. Song
刊名	Journal of Alloys and Compounds
	2020
卷号	820
ISSN号	9258388
DOI	10.1016/j.jallcom.2019.153415
英文摘要	The external cavity structure electron-beam-pumped (EB-pumped) vertical cavity surface emitting laser (VCSEL) has an important demand for the distributed Bragg reflector (DBR) with an emission window at the working wavelength called -cavity. Herein, AlGaN-based UV-C band DBRs with -cavities around 280 nm are designed and investigated in detail, which have almost no been reported so far. The DBRs based on alternate stacked Al0.47Ga0.53N/AlN bilayers are in-situ grown by low-pressure metal-organic chemical vapor deposition (LP-MOCVD). Through a comprehensive protocol of structure optimization by theoretical simulation, epitaxial growth and in-depth characterization and analysis, a high-performance UV-C band DBR with a -cavity around 280 nm is successfully fabricated. The DBR presents a reflectivity as high as 81.3% at the -cavity, a maximum reflectivity of 89.8% at 282 nm and a stopband with a full-width at half-maximum (FWHM) of 24.7 nm, laying a foundation for developing the external cavity structure EB-pumped AlGaN-based UV-C VCSELs emerging as a promising alternative to the electrically pumped AlGaN-based UV-C lasers. 2019 Elsevier B.V.
URL标识	查看原文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/64294]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. R. Chen, Z. W. Zhang, G. Q. Miao, H. Jiang, Z. M. Li and H. Song. AlGaN-based UV-C distributed Bragg reflector with a -cavity designed for an external cavity structure electron-beam-pumped VCSEL[J]. Journal of Alloys and Compounds,2020,820.
APA	Y. R. Chen, Z. W. Zhang, G. Q. Miao, H. Jiang, Z. M. Li and H. Song.(2020).AlGaN-based UV-C distributed Bragg reflector with a -cavity designed for an external cavity structure electron-beam-pumped VCSEL.Journal of Alloys and Compounds,820.
MLA	Y. R. Chen, Z. W. Zhang, G. Q. Miao, H. Jiang, Z. M. Li and H. Song."AlGaN-based UV-C distributed Bragg reflector with a -cavity designed for an external cavity structure electron-beam-pumped VCSEL".Journal of Alloys and Compounds 820(2020).