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	ATOMIC FORCE MICROSCOPE BASED MEASUREMENT METHOD AND DEVICE FOR RAPID IN-SITU SWITCHING OF INTEGRATED DOUBLE PROBE
	Liu LQ(刘连庆); Shi JL(施佳林); Yu P(于鹏)
	2022-03-24
著作权人	SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
国家	世界专利组织
文献子类	发明
产权排序	1
其他题名	原子力显微镜一体化双探针快速原位切换测量方法与装置
英文摘要	An atomic force microscope based measurement method and device for rapid in-situ switching of an integrated double probe (100). The device comprises the double probe (100) formed of a hinge structure (1), two cantilever beams (2, 3), and tips (4, 5) arranged at free ends of the cantilever beams (2, 3). The hinge structure (1) is a U-shaped body. The two tail ends of the U-shaped body respectively extend to form the first cantilever beam (2) and the second cantilever beam (3). The free end of the first cantilever beam (2) and the free end of the second cantilever beam (3) are respectively provided with the first tip (4) and the second tip (5). The integrated double probe (100) is used, and the driving function of a probe clamp (200) is used for driving a working probe to work, and therefore, a rapid probe in-situ switching function of the double probe (100) can be realized only by means of one set of motion control and measurement system based on an atomic force microscope.
申请日期	2021-05-08
语种	英语
状态	公开
内容类型	专利
源URL	[http://ir.sia.cn/handle/173321/30879]
专题	沈阳自动化研究所_机器人学研究室
作者单位	SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
推荐引用方式 GB/T 7714	Liu LQ,Shi JL,Yu P. ATOMIC FORCE MICROSCOPE BASED MEASUREMENT METHOD AND DEVICE FOR RAPID IN-SITU SWITCHING OF INTEGRATED DOUBLE PROBE. 2022-03-24.

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