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	METHOD AND DEVICE FOR MEASURING SIMULTANEOUS AND INDEPENDENT MOTION OF MULTIPROBE OF ATOMIC FORCE MICROSCOPE
	Liu LQ(刘连庆); Shi JL(施佳林); Yu P(于鹏)
	2022-03-24
著作权人	SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
国家	世界专利组织
文献子类	发明
产权排序	1
其他题名	一种原子力显微镜多探针同时独立运动测量方法与装置
英文摘要	The present invention relates to a method and device for measuring the simultaneous and independent motion of a multiprobe of an atomic force microscope. The device comprises at least two cantilever arms arranged in parallel, wherein a tip is arranged at the tail end of each cantilever arm; and grating structures, which follow a periodic distribution law, are arranged on the surfaces of the cantilever arms and are used for reflecting lasers, which irradiate the grating structures, and for receiving the reflected lasers by means of reflected light detectors. In the present invention, the distinguishing and motion measurement of multiple probes at an ultra-short distance are realized by one set of optical path systems. The specific method involves making measurement lasers of different wavelengths pass through the same optical path and simultaneously irradiate the back faces of the multiple probes, using the grating structures of different feature sizes as physical tags of the multiple probes, and reflecting high-order reflected light of the lasers of different wavelengths by the grating structures at different angles, thereby achieving the purpose of separating the optical path.
申请日期	2021-05-08
语种	英语
状态	公开
内容类型	专利
源URL	[http://ir.sia.cn/handle/173321/30878]
专题	沈阳自动化研究所_机器人学研究室
作者单位	SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
推荐引用方式 GB/T 7714	Liu LQ,Shi JL,Yu P. METHOD AND DEVICE FOR MEASURING SIMULTANEOUS AND INDEPENDENT MOTION OF MULTIPROBE OF ATOMIC FORCE MICROSCOPE. 2022-03-24.

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