A nanomanipulation system based on a sample-scanning AFM

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	A nanomanipulation system based on a sample-scanning AFM
	Tian XJ(田孝军); Liu LQ(刘连庆); Jiao ND(焦念东); Wang YC(王越超); Dong ZL(董再励)
	2004
会议日期	August 22-26, 2004
会议地点	Shenyang, China
关键词	Afm Nanomanipulation 3d Nano Forces Sensing Probe Positioning Errors Minimizing
页码	623-628
英文摘要	Atomic Force Microscope (AFM) has been proven to be a useful tool to characterize and change the sample surface down to the nanometer scale. However, in the AFM based nano manipulation, the main problem is the lack of real-time sensory feedback for an operator, which makes the manipulation almost in the dark and inefficient. For solving this problem, the AFM probe micro cantilever-tip is used not only as an end effector but also as a 3D nano forces sensor for sensing the interactive forces between the AFM probe tip and the object or substrate in nanomanipulation, and a kind of new and relatively easier parameters obtainment or calibration method in forces calculation has also been presented. In addition, for further improving probe positioning accuracy with a sample-scanning AFM, two important errors in probe positioning are quantitatively analyzed according to the tube scanner kinematics model presented in this paper, corresponding methods are adopted for minimizing the two errors and thus the probe positioning accuracy can be greatly improved. With 3D nano forces sensing through a haptic/force device and probe positioning accuracy improvement, the efficiency and accuracy of nano manipulation can be significantly improved. Experiments are presented to verify the effectiveness of the nanomanipulation system.
源文献作者	IEEE Robot & Automat Soc, IEEE HK RA CS Joint Chapter, Chinese Acad Sci, Shenyang Inst Automat, Chinese High tech Dev Program, Robot Soc Japan, Japan Soc Mech Engineers, Int Rescue Syst Inst, Shenyang Hunnan New Urban Area, Shenyang New & High tech Ind Dev Zone
产权排序	1
会议录	IEEE ROBIO 2004: Proceedings of the IEEE International Conference on Robotics and Biomimetics
会议录出版者	IEEE
会议录出版地	NEW YORK
语种	英语
ISBN号	0-7803-8641-8
WOS记录号	WOS:000234343000111
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/8492]
专题	沈阳自动化研究所_机器人学研究室
通讯作者	Tian XJ(田孝军)
作者单位	1.Graduate School, CAS, China 2.Shenyang Institute of Automation, CAS, China 3.Department of Electrical and Computer Enginerring, Michigan State University, United States
推荐引用方式 GB/T 7714	Tian XJ,Liu LQ,Jiao ND,et al. A nanomanipulation system based on a sample-scanning AFM[C]. 见:. Shenyang, China. August 22-26, 2004.