Effect of geometric position on the film properties for a complex-shaped substrate in HiPIMS discharge: Experiment and simulation | |
Li Hua5; Luo Yang5; Han Mingyue5; Tang Ling5; Gu Jiabin5; Li GD(李国栋)3,4; Deng Dachen5; Liu Hongtao2; Huang Kai1; Li Liuhe5 | |
刊名 | SURFACE & COATINGS TECHNOLOGY |
2022-03-25 | |
卷号 | 434页码:10 |
关键词 | HiPIMS Shadowing effect Ion dynamics 2D PIC-MCC |
ISSN号 | 0257-8972 |
DOI | 10.1016/j.surfcoat.2022.128196 |
通讯作者 | Li Guodong(lgd@imech.ac.cn) ; Li Liuhe(Liliuhe@buaa.edu.cn) |
英文摘要 | The purpose of this paper is to explore the effect of geometric position on the film properties for a complex shaped substrate in high-power impulse magnetron sputtering (HiPIMS) discharge. The substrate is a trapezoidal prism, whose base has four inner corners of 60?degrees, 120 degrees, 75 degrees, and 105 degrees. A negative bias is added to this trapezoidal prism during the high-density discharge to deposit TiAlSiN films. The chemical compositions, microstructures and mechanical properties of the films at different area of the substrate are analyzed using the energy dispersive spectroscopy, X-ray diffraction, scanning electron microscope, nano-indentor and Vickers indentation tester. Systematic investigations demonstrate that the films properties have prominent differences on various planes of the trapezoidal-prism sample, due to the so-called shadowing effect. Compared with the measurements on the plane perpendicular to the target surface, there is a higher average hardness and stronger toughness on the plane facing to the target surface. However, the values of both the hardness and toughness are the lowest on the plane facing away from the target surface. Moreover, even for the same plane, the enhanced mechanical properties as well as a smoother surface and denser microstructure appear in the edge regions, with respect to that in the planar center regions. To understand these interesting phenomena, a two-dimensional particle-in-cell/Monte Carlo collision simulation (2D PIC-MCC) and Transport of Ions in Matter method (TRIM) are employed to explore the ion dynamics at the different sites of the sample. Simulation results suggest that a higher ion flux density and larger re-sputtering rate may contribute to the improved film properties in the edge regions. These results in this paper are important for broadening the industrial applications of high ion fraction plasma sources in irregular structures, especially for cutting tools. |
分类号 | 二类/Q1 |
资助项目 | National Science and Tech-nology Major Project[2017-VII-0012-0108] ; National Science and Tech-nology Major Project[2017-VII-0003-0096] |
WOS关键词 | PHYSICAL VAPOR-DEPOSITION ; MECHANICAL-PROPERTIES ; TRIBOLOGICAL PROPERTIES ; NANOCOMPOSITE COATINGS ; CUTTING PERFORMANCE ; SHEATH STRUCTURE ; SHARP EDGES ; TIN FILMS ; MAGNETRON ; MICROSTRUCTURE |
WOS研究方向 | Materials Science ; Physics |
语种 | 英语 |
WOS记录号 | WOS:000779411900003 |
资助机构 | National Science and Tech-nology Major Project |
其他责任者 | Li Guodong ; Li Liuhe |
内容类型 | 期刊论文 |
源URL | [http://dspace.imech.ac.cn/handle/311007/88838] |
专题 | 宽域飞行工程科学与应用中心 |
作者单位 | 1.Chinese Acad Sci, Inst Elect Engn, Beijing, Peoples R China 2.Beijing Inst Aero space Control Devices, Beijing, Peoples R China; 3.Chinese Acad Sci, Inst Mech, Beijing, Peoples R China; 4.Univ Chinese Acad Sci, Sch Engn Sci, Beijing, Peoples R China; 5.Beihang Univ, Sch Mech Engn & Automat, Dept Mat Proc & Control Engn, Beijing, Peoples R China; |
推荐引用方式 GB/T 7714 | Li Hua,Luo Yang,Han Mingyue,et al. Effect of geometric position on the film properties for a complex-shaped substrate in HiPIMS discharge: Experiment and simulation[J]. SURFACE & COATINGS TECHNOLOGY,2022,434:10. |
APA | Li Hua.,Luo Yang.,Han Mingyue.,Tang Ling.,Gu Jiabin.,...&Li Liuhe.(2022).Effect of geometric position on the film properties for a complex-shaped substrate in HiPIMS discharge: Experiment and simulation.SURFACE & COATINGS TECHNOLOGY,434,10. |
MLA | Li Hua,et al."Effect of geometric position on the film properties for a complex-shaped substrate in HiPIMS discharge: Experiment and simulation".SURFACE & COATINGS TECHNOLOGY 434(2022):10. |
个性服务 |
查看访问统计 |
相关权益政策 |
暂无数据 |
收藏/分享 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论