The investigation of chemical vapor deposited copper-based niobium films

doi:10.1088/2053-1591/abefb1

	The investigation of chemical vapor deposited copper-based niobium films
	Li, Min 1; Pu, Guo 4; Luo, Yuchuan 4; Ye, Zongbiao 4; Wei, Jianjun 1; Chen, Shuwei 2; Wu, Andong 3; Yang, Li 4; Zhang, Kun 4; Gou, Fujun 4
刊名	MATERIALS RESEARCH EXPRESS
	2021-04-01
卷号	8 期号:4 页码:13
关键词	superconducting niobium films chemical vapor deposition hydrogen reduction micro-structure superconducting transition temperature
DOI	10.1088/2053-1591/abefb1
通讯作者	Ye, Zongbiao(zbye@scu.edu.cn) ; Wei, Jianjun(weijianjun@scu.edu.cn)
英文摘要	The deposition of niobium film on copper with excellent superconducting property at low-temperature conditions, used as superconducting radio frequency (SRF) cavity, is a serious and urgent technical problem to be solved at present. In this work, copper-based niobium (Nb) films with a thickness of 1.5-1.8 um, regulating the deposition temperature parameters and gas flow velocity in a tube furnace, were prepared by low-temperature chemical vapor depositing (CVD) method from the reaction between H-2 and Niobium chloride (NbCl5) under pure Ar atmosphere. Fabricated Nb films were characterized by X-ray diffraction, scanning electron microscopy and energy dispersive spectroscopy, respectively. The results showed that the excellent crystalline quality and superconductive performance of Nb films were generated successfully by CVD at low temperatures of 650 degrees C-700 degrees C. The preparation process was optimized during deposition and the formation mechanism of Nb films was also discussed in detail. The magnetic moment versus temperature of the Nb sample prepared at 700 degrees C was also measured and the well-prepared Nb film deposited in the boundary layer region obtains the desired superconducting transition temperature of 9.1 K +/- 0.1 K, almost equivalent to that of high pure Nb bulk material. The optimized CVD reaction method of Nb film with favorable morphology and expected superconductive property at low temperature provided a new strategy and technical process in designing the desired copper-based Nb film SRF cavity.
资助项目	Sichuan Science and Technology program[2020YFSY0007] ; Program National Natural Science Foundation[11705252] ; Key research project of the Chinese Academy of Sciences[QYZDY-SSW-JSC019] ; Scientific instrument development project of the Chinese Academy of Sciences[E028861Y] ; Fundamental Research Funds for the central Universities
WOS研究方向	Materials Science
语种	英语
出版者	IOP PUBLISHING LTD
WOS记录号	WOS:000641032100001
资助机构	Sichuan Science and Technology program ; Program National Natural Science Foundation ; Key research project of the Chinese Academy of Sciences ; Scientific instrument development project of the Chinese Academy of Sciences ; Fundamental Research Funds for the central Universities
内容类型	期刊论文
源URL	[http://119.78.100.186/handle/113462/137622]
专题	中国科学院近代物理研究所
通讯作者	Ye, Zongbiao; Wei, Jianjun
作者单位	1.Sichuan Univ, Inst Atom & Mol Phys, Chengdu 610064, Peoples R China 2.Sichuan Univ, Coll Phys, Chengdu 610064, Peoples R China 3.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China 4.Sichuan Univ, Inst Nucl Sci & Technol, Chengdu 610064, Peoples R China
推荐引用方式 GB/T 7714	Li, Min,Pu, Guo,Luo, Yuchuan,et al. The investigation of chemical vapor deposited copper-based niobium films[J]. MATERIALS RESEARCH EXPRESS,2021,8(4):13.
APA	Li, Min.,Pu, Guo.,Luo, Yuchuan.,Ye, Zongbiao.,Wei, Jianjun.,...&Wang, Hongbin.(2021).The investigation of chemical vapor deposited copper-based niobium films.MATERIALS RESEARCH EXPRESS,8(4),13.
MLA	Li, Min,et al."The investigation of chemical vapor deposited copper-based niobium films".MATERIALS RESEARCH EXPRESS 8.4(2021):13.