QQ客服 官方微博 反馈留言

	Analysis of growth rate and crystal quality of AlN epilayers by flow-modulated metal organic chemical vapor deposition
	Fangzheng Li;   Lianshan Wang ;   Weizhen Yao ;   Yulin Meng ;  Shaoyan Yang;   Zhanguo Wang
刊名	SUPERLATTICES AND MICROSTRUCTURES
	2020
卷号	137页码:106336
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/30660]
专题	半导体研究所_中科院半导体材料科学重点实验室
推荐引用方式 GB/T 7714	Fangzheng Li; Lianshan Wang ; Weizhen Yao ; Yulin Meng ;Shaoyan Yang; Zhanguo Wang. Analysis of growth rate and crystal quality of AlN epilayers by flow-modulated metal organic chemical vapor deposition[J]. SUPERLATTICES AND MICROSTRUCTURES,2020,137:106336.
APA	Fangzheng Li; Lianshan Wang ; Weizhen Yao ; Yulin Meng ;Shaoyan Yang; Zhanguo Wang.(2020).Analysis of growth rate and crystal quality of AlN epilayers by flow-modulated metal organic chemical vapor deposition.SUPERLATTICES AND MICROSTRUCTURES,137,106336.
MLA	Fangzheng Li; Lianshan Wang ; Weizhen Yao ; Yulin Meng ;Shaoyan Yang; Zhanguo Wang."Analysis of growth rate and crystal quality of AlN epilayers by flow-modulated metal organic chemical vapor deposition".SUPERLATTICES AND MICROSTRUCTURES 137(2020):106336.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。