| A Switchable High-Performance RF-MEMS Resonator with Flexible Frequency Generations | |
| Zeji Chen; Xiao Kan; Quan Yuan; Tianyun Wang; Jinling Yang; Fuhua Yang | |
| 刊名 | SCIENTIFIC REPORTS
 |
| 2020 | |
| 卷号 | 10期号:1页码:4795 |
| 公开日期 | 2020 |
| 内容类型 | 期刊论文 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/30582]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Zeji Chen; Xiao Kan; Quan Yuan; Tianyun Wang; Jinling Yang;Fuhua Yang. A Switchable High-Performance RF-MEMS Resonator with Flexible Frequency Generations[J]. SCIENTIFIC REPORTS,2020,10(1):4795. |
| APA | Zeji Chen; Xiao Kan; Quan Yuan; Tianyun Wang; Jinling Yang;Fuhua Yang.(2020).A Switchable High-Performance RF-MEMS Resonator with Flexible Frequency Generations.SCIENTIFIC REPORTS,10(1),4795. |
| MLA | Zeji Chen; Xiao Kan; Quan Yuan; Tianyun Wang; Jinling Yang;Fuhua Yang."A Switchable High-Performance RF-MEMS Resonator with Flexible Frequency Generations".SCIENTIFIC REPORTS 10.1(2020):4795. |
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