Microconformal electrode-dielectric integration for flexible ultrasensitive robotic tactile sensing

doi:10.1016/j.nanoen.2020.105580

	Microconformal electrode-dielectric integration for flexible ultrasensitive robotic tactile sensing
	Luo, Shi 2,3; Zhou, Xi 2; Tang, Xinyue 2; Li, Jialu 2; Wei, Dacheng 3; Tai, Guojun 2; Chen, Zongyong 1; Liao, Tingmao 1; Fu, Jianting 2; Wei, Dapeng 2
刊名	NANO ENERGY
	2021-02-01
卷号	80 页码:10
关键词	Microconformal structures Electrode-dielectric integration Capacitive pressure sensor Sensitivity Robotic tactile sensing
ISSN号	2211-2855
DOI	10.1016/j.nanoen.2020.105580
通讯作者	Wei, Dapeng(dpwei@cigit.ac.cn) ; Yang, Jun(jyang@cigit.ac.cn)
英文摘要	Flexible pressure sensors have attracted a lot of interest because of their widespread applications in healthcare, robotics, wearable smart devices, and human-machine interfaces. While microstructuring both the electrodes and dielectrics has been proven to have a significant improvement in the sensitivity and response speed of piezocapacitive sensors, the synergetic influence of microstructured electrodes and dielectrics has not been discussed yet. Herein, a flexible piezocapacitive sensor has been demonstrated with a microstructured graphene nanowalls (GNWs) electrode and a conformally microstructured dielectric layer that consists of polydimethylsiloxane (PDMS) and piezoelectric enhancer of zinc oxide (ZnO). Such microstructured assembly with piezoelectric film constructs a microconformal GNWs/PDMS/ZnO electrode-dielectric integration (MEDI), which can effectively enhance the sensitivity and the pressure-response range. The piezocapacitive sensor exhibits an ultra-high sensitivity (22.3 kPa(-1)), fast response speed (25 ms), and broad pressure range (22 kPa). The finite element analysis indicates that the polarized electric field caused by the ZnO film's piezoelectric effect greatly enhances the capacitance of the sensor. Moreover, the integration of the electrode and dielectric layer can eliminate the slippage between contiguous layers, which effectively increases the mechanical stability. Benefitting from the outstanding comprehensive performance, the potential application in robotic tactile perception has been successfully demonstrated, including object grabbing, braille recognition, and roughness detection. The MEDI in structure capacitive sensors provides a new approach to achieve high-performance E-skin, which delivers great potential applications in next-generation robotic tactile sensing.
资助项目	National Natural Science Foundation of China[NSFC 61504148] ; Project of CAS Western Young Scholar, Project of Chongqing Science and Technology Bureau[cstc2020jcyj-msxmX1041] ; Project of CAS Western Young Scholar, Project of Chongqing Science and Technology Bureau[cstc2019jcyj-msxmX0574] ; Project of CAS Western Young Scholar, Project of Chongqing Science and Technology Bureau[cstc2019jscx-msxmX0081] ; Project of CAS Western Young Scholar, Project of Chongqing Science and Technology Bureau[cstc2019jscx-msxmX0024]
WOS研究方向	Chemistry ; Science & Technology - Other Topics ; Materials Science ; Physics
语种	英语
出版者	ELSEVIER
WOS记录号	WOS:000618007800002
内容类型	期刊论文
源URL	[http://119.78.100.138/handle/2HOD01W0/12949]
专题	中国科学院重庆绿色智能技术研究院
通讯作者	Wei, Dapeng; Yang, Jun
作者单位	1.Guizhou Nat Technol CO LTD, Guiyang 550000, Guizhou, Peoples R China 2.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing 400714, Peoples R China 3.Fudan Univ, Shanghai 200433, Peoples R China
推荐引用方式 GB/T 7714	Luo, Shi,Zhou, Xi,Tang, Xinyue,et al. Microconformal electrode-dielectric integration for flexible ultrasensitive robotic tactile sensing[J]. NANO ENERGY,2021,80:10.
APA	Luo, Shi.,Zhou, Xi.,Tang, Xinyue.,Li, Jialu.,Wei, Dacheng.,...&Yang, Jun.(2021).Microconformal electrode-dielectric integration for flexible ultrasensitive robotic tactile sensing.NANO ENERGY,80,10.
MLA	Luo, Shi,et al."Microconformal electrode-dielectric integration for flexible ultrasensitive robotic tactile sensing".NANO ENERGY 80(2021):10.