Femtosecond Laser-Etched MXene Microsupercapacitors with Double-Side Configuration via Arbitrary On- and Through-Substrate Connections

doi:10.1002/aenm.202000470

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	Femtosecond Laser-Etched MXene Microsupercapacitors with Double-Side Configuration via Arbitrary On- and Through-Substrate Connections
	Li, Qiang 1,2; Wang, Qizhao 3; Li, Linlin 2; Yang, Lijun 1,2; Wang, Yang 1,2; Wang, Xiaohui 4; Fang, Hai-Tao 3
刊名	ADVANCED ENERGY MATERIALS
	2020-05-04
卷号	10 期号:24 页码:8
关键词	double-sided femtosecond laser etching high integration microsupercapacitors MSCs MXene MSCs
ISSN号	1614-6832
DOI	10.1002/aenm.202000470
通讯作者	Yang, Lijun(yljtj@hit.edu.cn) ; Wang, Xiaohui(wang@imr.ac.cn) ; Fang, Hai-Tao(htfang@hit.edu.cn)
英文摘要	The capacitance of microsupercapacitors (MSCs) can double if both sides of substrates are used to construct MSCs. Nevertheless, achieving electric connections of MSCs through substrates is a challenge due to the difficulty in precisely positioning each MSC couple that has two of the same MSCs units on two sides. In this work, taking advantage of the synchronous etching on both sides of transparent polyethylene terephthalate substrates by femtosecond laser pulses, a double-sided configuration is attained with high precision in the alignment of back-to-back MSC couples and versatile double-side MSCs are realized via arbitrary on- and through-substrate connections of MXene MSC units. The MXene double-side MSC fabricated by the series connection of 12 spiral pattern MXene MSC units with interdigital electrodes of 10 mu m width interspace can output a large working voltage of 7.2 V. Additionally, femtosecond laser etching brings the transformation of MXene into titania near-etched edges with a lateral distance less than 1 mu m. Such a small laser-affected area has little influence on the capacitive performance, which is one of advantages for femtosecond laser over conventional lasers. This research is valuable for one-step manufacturing of highly integrated MSCs in the field of miniaturized energy storage systems.
资助项目	National Key R&D Program of China[2018YFB1107600]
WOS研究方向	Chemistry ; Energy & Fuels ; Materials Science ; Physics
语种	英语
出版者	WILEY-V C H VERLAG GMBH
WOS记录号	WOS:000530456900001
资助机构	National Key R&D Program of China
内容类型	期刊论文
源URL	[http://ir.imr.ac.cn/handle/321006/138717]
专题	金属研究所_中国科学院金属研究所
通讯作者	Yang, Lijun; Wang, Xiaohui; Fang, Hai-Tao
作者单位	1.Harbin Inst Technol, Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Heilongjiang, Peoples R China 2.Harbin Inst Technol, Sch Mechatron Engn, Harbin 150001, Heilongjiang, Peoples R China 3.Harbin Inst Technol, Sch Mat Sci & Engn, Harbin 150001, Heilongjiang, Peoples R China 4.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Li, Qiang,Wang, Qizhao,Li, Linlin,et al. Femtosecond Laser-Etched MXene Microsupercapacitors with Double-Side Configuration via Arbitrary On- and Through-Substrate Connections[J]. ADVANCED ENERGY MATERIALS,2020,10(24):8.
APA	Li, Qiang.,Wang, Qizhao.,Li, Linlin.,Yang, Lijun.,Wang, Yang.,...&Fang, Hai-Tao.(2020).Femtosecond Laser-Etched MXene Microsupercapacitors with Double-Side Configuration via Arbitrary On- and Through-Substrate Connections.ADVANCED ENERGY MATERIALS,10(24),8.
MLA	Li, Qiang,et al."Femtosecond Laser-Etched MXene Microsupercapacitors with Double-Side Configuration via Arbitrary On- and Through-Substrate Connections".ADVANCED ENERGY MATERIALS 10.24(2020):8.