Nano-structured WO3 Thin Films Deposited by Glancing Angle Magnetron Sputtering

doi:10.15541/jim20180130

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	Nano-structured WO3 Thin Films Deposited by Glancing Angle Magnetron Sputtering
	Wang Mei-Han 1; Wen Jia-Xing 1; Chen Yun 1; Lei Hao 2
刊名	JOURNAL OF INORGANIC MATERIALS
	2018-12-20
卷号	33 期号:12 页码:1303-1308
关键词	WO3 thin films nano-structured glancing angle magnetron sputtering
ISSN号	1000-324X
DOI	10.15541/jim20180130
通讯作者	Wang Mei-Han(wangmhdicp@aliyun.com)
英文摘要	Nano-structured tungsten oxide (WO3) thin films were deposited at room temperature by glancing angle reactive magnetron sputtering and then annealed at 450 degrees C in air. The films were characterized by field-emission scanning electron microscope (FE-SEM) and X-ray diffraction (XRD). The WO3 thin film deposited by DC magnetron sputtering at 80 degrees glancing angle exhibited oblique nano-column structure, while deposited by pulsed DC magnetron sputtering at the same angle exhibits nano-pore structure. After annealing at 450 degrees C for 3 h, the oblique nanocolums are conjunct with each other but the nano-pore structured remains with bigger pore size. XRD analysis reveals that WO3 thin films deposited at room temperature demonstrate amorphous structure. The amorphous structure will transfers to monoclinic phase after annealing at 450 degrees C for 1 h. Transmittance difference between colorization and bleaching of nano-structured WO3 thin film reaches 60% at wavelength of 600 nm. Electrochromic properties of nano-structured WO3 thin films are highly reversible.
资助项目	National Natural Science Foundation of China[51302175] ; Program for Liaoning Excellent Talents in University[LJQ2014132]
WOS研究方向	Materials Science
语种	英语
出版者	SCIENCE PRESS
WOS记录号	WOS:000455987800005
资助机构	National Natural Science Foundation of China ; Program for Liaoning Excellent Talents in University
内容类型	期刊论文
源URL	[http://ir.imr.ac.cn/handle/321006/131133]
专题	金属研究所_中国科学院金属研究所
通讯作者	Wang Mei-Han
作者单位	1.Shenyang Univ, Sch Mech Engn, Shenyang 110044, Liaoning, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Surface Engn Mat Div, Shenyang 110016, Liaoning, Peoples R China
推荐引用方式 GB/T 7714	Wang Mei-Han,Wen Jia-Xing,Chen Yun,et al. Nano-structured WO3 Thin Films Deposited by Glancing Angle Magnetron Sputtering[J]. JOURNAL OF INORGANIC MATERIALS,2018,33(12):1303-1308.
APA	Wang Mei-Han,Wen Jia-Xing,Chen Yun,&Lei Hao.(2018).Nano-structured WO3 Thin Films Deposited by Glancing Angle Magnetron Sputtering.JOURNAL OF INORGANIC MATERIALS,33(12),1303-1308.
MLA	Wang Mei-Han,et al."Nano-structured WO3 Thin Films Deposited by Glancing Angle Magnetron Sputtering".JOURNAL OF INORGANIC MATERIALS 33.12(2018):1303-1308.