STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES

doi:10.11900/0412.1961.2016.00078

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	STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES
	Han Kechang 1; Liu Yiqi 1; Lin Guoqiang 1; Dong Chuang 1; Tai Kaiping 2; Jiang Xin 2
刊名	ACTA METALLURGICA SINICA
	2016-12-12
卷号	52 期号:12 页码:1601-1609
关键词	transition-metal nitride film arc ion plating composition mechanical property strengthening mechanism
ISSN号	0412-1961
DOI	10.11900/0412.1961.2016.00078
通讯作者	Lin Guoqiang(gqlin@dlut.edu.cn)
英文摘要	Transition-metal nitrides have long attracted considerable attention among researchers and ubiquitous applications in various fields due to their renowned mechanical properties. However almost all the discussions of the strengthening mechanism were on conventional meso scale. For further understanding on the atomic scale strengthening mechanism of transition-metal nitrides, three groups of MNx(M=Ti, Zr, Hf) films with different nitrogen contents were synthesized on the Si substrates by magnetic filtering arc ion plating. The morphologies and thickness of the as-deposited films were characterized by FESEM, the microstructures and the residual stresses were characterized by XRD, the XPS and Nano Indenter were used to measure the chemical states and hardness (also the elastic modulus) of as-deposited films, respectively. The results show that all three groups MNx films perform the B1-NaCl single-phase structure within the large composition ranges. The preferred orientation, thickness, grain size and residual stress of the MNx films with different nitrogen contents were not changed so much. While the nanohardness and elastic modulus of MNx both first increased and then decreased with the rise of nitrogen content, and the peak values all existed when x near to 0.82. The strengthening mechanism was discussed and the decisive factor of composition dependent hardness enhancement was found from the atomic-scale chemical bonding states and electronic structure in this work, rather than the conventional meso-scale factors, such as preferred orientation, grain size and residual stress.
资助项目	National Natural Science Foundation of China[51271047]
WOS研究方向	Metallurgy & Metallurgical Engineering
语种	英语
出版者	SCIENCE PRESS
WOS记录号	WOS:000391244600015
资助机构	National Natural Science Foundation of China
内容类型	期刊论文
源URL	[http://ir.imr.ac.cn/handle/321006/123553]
专题	金属研究所_中国科学院金属研究所
通讯作者	Lin Guoqiang
作者单位	1.Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Elect Beams, Dalian 116024, Peoples R China 2.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Han Kechang,Liu Yiqi,Lin Guoqiang,et al. STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES[J]. ACTA METALLURGICA SINICA,2016,52(12):1601-1609.
APA	Han Kechang,Liu Yiqi,Lin Guoqiang,Dong Chuang,Tai Kaiping,&Jiang Xin.(2016).STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES.ACTA METALLURGICA SINICA,52(12),1601-1609.
MLA	Han Kechang,et al."STUDY ON ATOMIC-SCALE STRENGTHENING MECHANISM OF TRANSITION-METAL NITRIDE MNx (M=Ti, Zr, Hf) FILMS WITHIN WIDE COMPOSITION RANGES".ACTA METALLURGICA SINICA 52.12(2016):1601-1609.