Influence and optimization of CCOS processing path to surface errors

doi:10.1117/12.2505178

	Influence and optimization of CCOS processing path to surface errors
	Cai, Faming 1,2,3; Wan, Yongjian 1; Liu, Haitao 1; Han, Xiaolei 2; Zhang, Rongzhu 2
	2019
会议日期	June 26, 2018 - June 29, 2018
会议地点	Chengdu, China
关键词	Optical fabrication Computer Controlled Optical Surfacing Middle spatial frequency errors locally random path
卷号	10838
DOI	10.1117/12.2505178
页码	1083812
英文摘要	Computer Controlled Optical Surfacing (CCOS) technology is one of the most commonly method in optical manufacture. Though CCOS is efficient, there is an unavoidable disadvantage. Middle and high spatial frequency errors, also called the ripple errors, will be left over on the optical surface. This kind of error may have a serious impact on the performance of the optical system. Focus on the grating path, the quantitative relationship between step size and ripple errors is obtained. In order to effectively restrain the ripple errors, a locally random path with Gaussian distribution is proposed. The surface figures that achieved by two different tool paths have been simulated. The results prove that the locally random path can re-distribute the remove amount of the surface. Therefore, the regular remove distribution caused by grating path disappears. It means that the specific surface errors can be restrained effectively. © 2019 COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.
会议录	Proceedings of SPIE 10838 - 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
会议录出版者	SPIE
文献子类	会议论文
语种	英语
ISSN号	0277-786X
WOS研究方向	Engineering, Manufacturing ; Optics
WOS记录号	WOS:000459715700037
WOS关键词	FABRICATION ; OPTICS
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9606]
专题	光电技术研究所_先光中心
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 2.Sichuan University, School of Manufacturing Science and Engineering, Chengdu; 610065, China; 3.University of Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式 GB/T 7714	Cai, Faming,Wan, Yongjian,Liu, Haitao,et al. Influence and optimization of CCOS processing path to surface errors[C]. 见:. Chengdu, China. June 26, 2018 - June 29, 2018.