Deposition of high reflective films on deformable mirror for high power laser system

doi:10.1117/1.OE.59.5.057103

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 自适应光学技术研究室（八室）

	Deposition of high reflective films on deformable mirror for high power laser system
	Long, Guoyun 1,2; Zhang, Yaoping 2; Fan, Xinlong 2; Zhou, Hong 2; Guan, Chunlin 2
刊名	Optical Engineering
	2020-05-01
卷号	59 期号:5 页码:057103-1-8
ISSN号	0091-3286
DOI	10.1117/1.OE.59.5.057103
文献子类	期刊论文
英文摘要	High reflective (HR) films with low stress and high damage threshold are deposited on a high-density deformable mirror (HDM) for a high-power laser system. The parameters of the laser system are about 5 J, 6 ns, and 200 Hz @ 1064 nm. The surface figure of the HDM is measured before and after coating, respectively. After coating, the surface error of HDM is only 39-nm rms, and the results show that the residual stress of HR films is very small. Then, a φ50-mm sample and the HDM are tested successively in the high-power laser system. The temperature rise of the sample and HDM are measured in real-time. Finally, the temperature of HDM has risen by 10°C, while the sample is changed by only 1°C. © 2020 Society of Photo-Optical Instrumentation Engineers (SPIE).
语种	英语
WOS记录号	WOS:000542976000049
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/10097]
专题	光电技术研究所_自适应光学技术研究室（八室）
作者单位	1.University of Chinese Academy of Sciences, Beijing, China 2.Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu, China;
推荐引用方式 GB/T 7714	Long, Guoyun,Zhang, Yaoping,Fan, Xinlong,et al. Deposition of high reflective films on deformable mirror for high power laser system[J]. Optical Engineering,2020,59(5):057103-1-8.
APA	Long, Guoyun,Zhang, Yaoping,Fan, Xinlong,Zhou, Hong,&Guan, Chunlin.(2020).Deposition of high reflective films on deformable mirror for high power laser system.Optical Engineering,59(5),057103-1-8.
MLA	Long, Guoyun,et al."Deposition of high reflective films on deformable mirror for high power laser system".Optical Engineering 59.5(2020):057103-1-8.