Fabrication of Vertical Organic Nanowire Arrays via Modified Nanoimprint Lithography

doi:10.1166/nnl.2019.2972

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微电子装备总体研究室（四室）

	Fabrication of Vertical Organic Nanowire Arrays via Modified Nanoimprint Lithography
	Zhang, Man 2; Xia, Liangping 1; Dang, Suihu ; Cao, Axiu 2; Shi, Lifang 2; Deng, Qiling 2; Du, Chunlei
刊名	NANOSCIENCE AND NANOTECHNOLOGY LETTERS
	2019-07-01
卷号	11 期号:7 页码:1004-1007
关键词	Vertical Organic Nanowire Arrays Modified Nanoimprint Lithography Porous Anodic Alumina High-Aspect-Ratio Chemical Corrosion Solution
ISSN号	1941-4900
DOI	10.1166/nnl.2019.2972
文献子类	期刊论文
英文摘要	In this study, polymer high-aspect-ratio vertical organic nanowire arrays with sub-100 nm resolution were fabricated using a new method based on modified nanoimprint lithography, including UV-imprinting process and chemical corrosion solution. Porous anodic alumina membranes are the imprint templates having pore diameters of about 300 nm and 70 nm-90 nm. We performed the fabrication of the polymer nanowire array structures. Replication performance for the UV-curable imprint resister was verified by nanoimprinting technique to replicate the porous anodic alumina templates. Releasing the templates using chemical corrosion of alkali solution, we achieved the polymer nanowire arrays with nanowire diameters of 300 nm and 70 nm-90 nm and depths of 30 mu m and 3 mu m, and the aspect ratio of about 100:1 and 40:1. We herein also discuss the physical performance of the polymer resist and optical performance for high-aspect-ratio structures. The polymer nanowire arrays have potential applications such as electronic and optical devices and new method in complicated and extreme structures.
出版地	VALENCIA
WOS研究方向	Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
语种	英语
出版者	AMER SCIENTIFIC PUBLISHERS
WOS记录号	WOS:000483217400013
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9748]
专题	光电技术研究所_微电子装备总体研究室（四室）
作者单位	1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China 2.Yangtze Normal Univ, Sch Elect Informat Engn, Chongqing 408100, Peoples R China 3.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing Key Lab Multiscale Mfg Technol, Chongqing 400714, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Man,Xia, Liangping,Dang, Suihu,et al. Fabrication of Vertical Organic Nanowire Arrays via Modified Nanoimprint Lithography[J]. NANOSCIENCE AND NANOTECHNOLOGY LETTERS,2019,11(7):1004-1007.
APA	Zhang, Man.,Xia, Liangping.,Dang, Suihu.,Cao, Axiu.,Shi, Lifang.,...&Du, Chunlei.(2019).Fabrication of Vertical Organic Nanowire Arrays via Modified Nanoimprint Lithography.NANOSCIENCE AND NANOTECHNOLOGY LETTERS,11(7),1004-1007.
MLA	Zhang, Man,et al."Fabrication of Vertical Organic Nanowire Arrays via Modified Nanoimprint Lithography".NANOSCIENCE AND NANOTECHNOLOGY LETTERS 11.7(2019):1004-1007.