Influence of deposition temperature on the structure, optical and electrical properties of a-C films by DCMS

doi:10.1016/j.apsusc.2019.144310

CORC > 宁波材料技术与工程研究所 > 中国科学院宁波材料技术与工程研究所 > 2020专题

	Influence of deposition temperature on the structure, optical and electrical properties of a-C films by DCMS
	Li, Hao ; Guo, Peng ; Zhang, Dong ; Chen, Rende ; Zuo, Xiao ; Ke, Peiling ; Saito, Hidetoshi ; Wang, Aiying
刊名	APPLIED SURFACE SCIENCE
	2020
卷号	503
关键词	DIAMOND-LIKE-CARBON AMORPHOUS-CARBON SUBSTRATE-TEMPERATURE THIN-FILMS GROWTH SPECTROSCOPY SP(3) TAUC GAP ARC
DOI	10.1016/j.apsusc.2019.144310
英文摘要	Amorphous carbon films have been considered as strongly promising semiconductor materials, due to their superior mechanical properties, specific bond structures, as well as facile deposition over large area with device integrated processes. To figure out the effect of sp(2)/sp(3) ratio and size of sp(2) clusters on opto-electrical behavior, we fabricated a series of H-free amorphous carbon (a-C) films by magnetron sputtering with a controllable deposition temperature from 30 to 400 degrees C. Result showed that all the films displayed a strong light absorption in the ultraviolet and visible regions, where the transmittance was less than 5% in the wavelength range of 200-750 nm, demonstrating the typical semiconductor behavior in temperature from 5 to 350 K, exhibiting a lower resistivity at higher temperature. In addition, their transmittance, optical bandgap, resistivity and activation energy showed similar tendency with increasing deposition temperature, which was discussed in terms of the evolution of sp(2)/sp(3) ratio and sp(2) cluster in the a-C films. These studies provide a new route to tune optical and electrical properties of a-C films for their opto-electrical applications.
学科主题	Chemistry ; Materials Science ; Physics
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/19975]
专题	2020专题
作者单位	1.Wang, AY (corresponding author), Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Zhejiang Key Lab Marine Mat & Protect Technol, Key Lab Marine Mat & Related Technol, Ningbo 315201, Zhejiang, Peoples R China. 2.Guo, P
推荐引用方式 GB/T 7714	Li, Hao,Guo, Peng,Zhang, Dong,et al. Influence of deposition temperature on the structure, optical and electrical properties of a-C films by DCMS[J]. APPLIED SURFACE SCIENCE,2020,503.
APA	Li, Hao.,Guo, Peng.,Zhang, Dong.,Chen, Rende.,Zuo, Xiao.,...&Wang, Aiying.(2020).Influence of deposition temperature on the structure, optical and electrical properties of a-C films by DCMS.APPLIED SURFACE SCIENCE,503.
MLA	Li, Hao,et al."Influence of deposition temperature on the structure, optical and electrical properties of a-C films by DCMS".APPLIED SURFACE SCIENCE 503(2020).