MEMS piezo-resistive force sensor based on DC sputtering deposited amorphous carbon films

doi:10.1016/j.sna.2019.111700

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	MEMS piezo-resistive force sensor based on DC sputtering deposited amorphous carbon films
	Ma, Xin ; Tong, Xiaoshan ; Guo, Peng ; Zhao, Yulong ; Zhang, Qi ; Li, Hanchao ; Chen, Rende ; Wang, Aiying
刊名	SENSORS AND ACTUATORS A-PHYSICAL
	2020
卷号	303
关键词	DIAMOND-LIKE CARBON DLC FILMS STRAIN
DOI	10.1016/j.sna.2019.111700
英文摘要	The rapid growing demand of micro-electromechanical system (MEMS) sensors brings an urgent need for high performance and low cost sensitive materials. In this work, amorphous carbon (a-C) film was in-situ deposited on silicon substrate as strain sensitive component using economical direct current (DC) magnetron sputtering process and the a-C sensor was systematically designed, fabricated and tested. By adjusting the negative bias voltage in the range of 0-400 V, the gauge factor (GF) of the a-C film was adjusted within the range of 3.3-6.9. What's more, the film's sp(2) cluster size played an important role in their piezo-resistive performance and conductivity, which illustrated the thick-film resistors (TFRs) theory. Additionally, CAFM results also supported the applying of TFRs theory in this work. Benefiting from the outstanding performance of a-C film, the MEMS force sensor, consisted a Wheatstone full-bridge with four a-C piezo-resistors, had a sensitivity of 9.8 mu V/V/mN and non-linearity about 2.0% FS in the testing range of 0-210 mN, while it also showed a good repeatability. These investigations provided deeper insight into the piezo-resistive behavior of a-C film and contributed to the development of high performance and more economical sensitive materials for MEMS sensors. (C) 2019 Elsevier B.V. All rights reserved.
学科主题	Engineering ; Instruments & Instrumentation
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/19916]
专题	2020专题
作者单位	1.Zhang, Q (corresponding author), Xi An Jiao Tong Univ, State Key Lab Mech Mfg Syst, Xian 710049, Peoples R China. 2.Wang, AY (corresponding author), Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Key Lab Marine Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo 315201, Peoples R China.
推荐引用方式 GB/T 7714	Ma, Xin,Tong, Xiaoshan,Guo, Peng,et al. MEMS piezo-resistive force sensor based on DC sputtering deposited amorphous carbon films[J]. SENSORS AND ACTUATORS A-PHYSICAL,2020,303.
APA	Ma, Xin.,Tong, Xiaoshan.,Guo, Peng.,Zhao, Yulong.,Zhang, Qi.,...&Wang, Aiying.(2020).MEMS piezo-resistive force sensor based on DC sputtering deposited amorphous carbon films.SENSORS AND ACTUATORS A-PHYSICAL,303.
MLA	Ma, Xin,et al."MEMS piezo-resistive force sensor based on DC sputtering deposited amorphous carbon films".SENSORS AND ACTUATORS A-PHYSICAL 303(2020).