Demonstration of ohmic contact using MoOx/Al on p-GaN and the proposal of a reflective electrode for AlGaN-based DUV-LEDs

doi:10.1364/OL.387275

CORC > 宁波材料技术与工程研究所 > 中国科学院宁波材料技术与工程研究所 > 2020专题

	Demonstration of ohmic contact using MoOx/Al on p-GaN and the proposal of a reflective electrode for AlGaN-based DUV-LEDs
	Li, Liang ; Cui, Mei ; Shao, Hua ; Dai, Yijun ; Chen, Li ; Zhang, Zi-Hui ; Hoo, Jason ; Guo, Sniping ; Lan, Wen'an ; Cao, Lili
刊名	OPTICS LETTERS
	2020
卷号	45 期号:8 页码:2427-2430
关键词	DEEP-UV LEDS REALIZATION RESISTANCE GROWTH LAYER
DOI	10.1364/OL.387275
英文摘要	The MoOx/Al electrode was designed and fabricated on p-GaN and sapphire with good ohmic behavior and decent deep ultraviolet (DUV) reflectivity, respectively. The influences of MoOx thickness and annealing condition on the electrical and optical behaviors of the MoOx/Al structure were investigated. Surface morphology of MoOx with different thicknesses reveals a 3D growth mode. Partial decomposition of MoOx was discovered, which helps in the formation of ohmic contact between MoOx and Al. The potential for application in deep ultraviolet light-emitting-diodes (DUV-LEDs) has also been demonstrated. (C) 2020 Optical Society of America
学科主题	Optics
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/19791]
专题	2020专题
作者单位	1.Guo, W (corresponding author), Univ Chinese Acad Sci, Beijing 100049, Peoples R China. 2.Guo, W (corresponding author), Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China.
推荐引用方式 GB/T 7714	Li, Liang,Cui, Mei,Shao, Hua,et al. Demonstration of ohmic contact using MoOx/Al on p-GaN and the proposal of a reflective electrode for AlGaN-based DUV-LEDs[J]. OPTICS LETTERS,2020,45(8):2427-2430.
APA	Li, Liang.,Cui, Mei.,Shao, Hua.,Dai, Yijun.,Chen, Li.,...&Ye, Jichun.(2020).Demonstration of ohmic contact using MoOx/Al on p-GaN and the proposal of a reflective electrode for AlGaN-based DUV-LEDs.OPTICS LETTERS,45(8),2427-2430.
MLA	Li, Liang,et al."Demonstration of ohmic contact using MoOx/Al on p-GaN and the proposal of a reflective electrode for AlGaN-based DUV-LEDs".OPTICS LETTERS 45.8(2020):2427-2430.