Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching

	Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching
	Lihao Wang; Meijie Liu ; Junyuan Zhao ; Jicong Zhao ; Yinfang Zhu; Jinling Yang; Fuhua Yang
刊名	MICROMACHINES
	2020
卷号	11 期号:7 页码:638
语种	英语
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/30469]
专题	半导体研究所_半导体集成技术工程研究中心
推荐引用方式 GB/T 7714	Lihao Wang; Meijie Liu ; Junyuan Zhao ; Jicong Zhao ;Yinfang Zhu;Jinling Yang; Fuhua Yang. Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching[J]. MICROMACHINES,2020,11(7):638.
APA	Lihao Wang; Meijie Liu ; Junyuan Zhao ; Jicong Zhao ;Yinfang Zhu;Jinling Yang; Fuhua Yang.(2020).Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching.MICROMACHINES,11(7),638.
MLA	Lihao Wang; Meijie Liu ; Junyuan Zhao ; Jicong Zhao ;Yinfang Zhu;Jinling Yang; Fuhua Yang."Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching".MICROMACHINES 11.7(2020):638.