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	Method of fabrication of a micro-optics device with curved surface defects
	ARMIN W KNOLL; URS T DUERIG; FEI DING; THILO HERMANN STOEFERLE; RAINER F MAHRT
	2013-10-02
著作权人	INTERNATIONAL BUSINESS MACHINES CORPORATION
专利号	GB2500670A
国家	英国
文献子类	发明申请
其他题名	Method of fabrication of a micro-optics device with curved surface defects
英文摘要	A method of making a micro-optics device, such as a vertical cavity surface emitting laser (VCSEL), comprising providing a layer 300 of material, patterning said layer 300 to form a curved defect 20 which may be Gaussian or parabolic in one or more planes parallel to the vertical axis, and providing at least another layer or material in contact with the curved surface 20. The additional layers may form a distributed Bragg reflector (DBR). The patterning uses nano-lithographic techniques based on scanning probe microscopy (SPM), using a nano-scale tipped probe 50 to desorb the surface molecules, which may be non-covalently or hydrogenically bonded, or unzipping (depolymerising) polymer chains. The method serves to provide lateral photon confinement, increase the quality (Q) factor of the microcavity and reduce the mode volume.
公开日期	2013-10-02
申请日期	2012-03-29
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/91486]
专题	半导体激光器专利数据库
作者单位	INTERNATIONAL BUSINESS MACHINES CORPORATION
推荐引用方式 GB/T 7714	ARMIN W KNOLL,URS T DUERIG,FEI DING,et al. Method of fabrication of a micro-optics device with curved surface defects. GB2500670A. 2013-10-02.

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