| Die level optical transduction systems | |
| OSIANDER, ROBERT; ANDREOU, ANDREAS G.; TEJADA, FRANCISCO; WESOLEK, DANIELLE M.; MIRAGLIOTTA, JOSEPH A.; POULIQUEN, PHILIPPE O.; WICKENDEN, DENNIS K. | |
| 2006-08-31 | |
| 著作权人 | THE JOHNS HOPKINS UNIVERSITY |
| 专利号 | US20060193356A1 |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | Die level optical transduction systems |
| 英文摘要 | A scalable architecture based in silicon on sapphire (SOS) CMOS for building an interferometric optical detection system to sense the motion of a resonating MEMS device or to detect the motion of any object to which the system is packaged. The SOS CMOS device is packaged with both vertical cavity surface emitting lasers (VCSELs) and MEMS devices. The optical transparency of the sapphire substrate together with the ultra thin silicon PIN photodiodes available in the SOS process allows for the design of both a Michelson-type and Fabry-Perot-type interferometer. The detectors, signal processing electronics and VCSEL drivers are built on the SOS CMOS for a complete system. |
| 公开日期 | 2006-08-31 |
| 申请日期 | 2006-01-17 |
| 状态 | 失效 |
| 内容类型 | 专利 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/91065]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | THE JOHNS HOPKINS UNIVERSITY |
| 推荐引用方式 GB/T 7714 | OSIANDER, ROBERT,ANDREOU, ANDREAS G.,TEJADA, FRANCISCO,et al. Die level optical transduction systems. US20060193356A1. 2006-08-31. |
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