半導体レーザ
池田 昌夫; 森田 悦男
1998-09-04
著作权人ソニー株式会社
专利号JP2821600B2
国家日本
文献子类授权发明
其他题名半導体レーザ
英文摘要PURPOSE:To obtain a complete crystal under an optimum MOCVD condition at 680 deg.C and to make an oscillation wavelength short by a method wherein individual layers constituting an AlGaInP-based laser are grown by using a compound semiconductor substrate where a crystal plane tilted at a prescribed angle from a 111B crystal plane is used as a main face. CONSTITUTION:An n-type GaAs buffer layer 12, a first clad layer 13, an active layer 14, a second clad layer 15, a P-type GaInP cap layer 16 and a P-type GaAs cap layer 17 are grown, by MOCVD under an optimum condition, on an n-type GaAs substrate 11 where a crystal plane tilted at 2 deg. is used as a main face and which is doped with Si. Then, a Ti/Pt/Au layer 18 and a stripe- shaped Au layer 19 are formed; ions are implanted; a high-resistance region 21 is formed. An oscillation wavelength of this DH semiconductor laser is 649nm by a pulse operation at room temperature and is made shorter by 30nm or above.
公开日期1998-11-05
申请日期1988-09-02
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/88287]  
专题半导体激光器专利数据库
作者单位ソニー株式会社
推荐引用方式
GB/T 7714
池田 昌夫,森田 悦男. 半導体レーザ. JP2821600B2. 1998-09-04.
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