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	A method of making a component for a microelectronic circuit and a semiconductor device and an optical waveguide made by that method
	HOVEL, HAROLD JOHN; KUECH, THOMAS FRANCIS
	1986-02-12
著作权人	INTERNATIONAL BUSINESS MACHINES CORPORATION
专利号	EP0171226A2
国家	欧洲专利局
文献子类	发明申请
其他题名	A method of making a component for a microelectronic circuit and a semiconductor device and an optical waveguide made by that method
英文摘要	A portion of a first layer (14; 34) exposed through an opening (20; 40) in a second layer (18; 38) is chemically converted to a compound having properties different to those of the first layer. By arranging that the conversion to the compound extends beyond the boundary of the opening and removing the compound, further material (24) can be depositied onto the substrate (12) through the opening (20 In this manner, a self-aligned semiconductor device can be formed with the further material (24) serving as the gate of the device. If the conversion to the compound is limited to the portion of the first layer directly below the opening (40) and the compound has an index of refraction different from that of the first layer, the converted portion (36) can serve as an optical waveguide.
公开日期	1986-02-12
申请日期	1985-07-23
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/87937]
专题	半导体激光器专利数据库
作者单位	INTERNATIONAL BUSINESS MACHINES CORPORATION
推荐引用方式 GB/T 7714	HOVEL, HAROLD JOHN,KUECH, THOMAS FRANCIS. A method of making a component for a microelectronic circuit and a semiconductor device and an optical waveguide made by that method. EP0171226A2. 1986-02-12.

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